| | Multiple Profile Scan | |  |
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| Optical profilometry extremely fast |  back |
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| Definition
The Multiple Profile Scan (MXZ) uses a correlation technique to assemble perfectly overlapping single profiles (XZ) and auxiliary images (XY) into an overall profile. | | |
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Silicon grooves, Multiple Profile Scan composed of 35 single profiles.
EC Epiplan-Neofluar 20x/0.5, 12.768 mm x 0.180 mm, 28,200 pixels x 1800 slices. | | |
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| Dimensions
Scanning range extension: XY *30 (with Scan Zoom)
Total measuring time: 0-8 minutes
Maximum data format: 31,600 data points x 2000 slices | | |
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| Application
- Highly resolved optical profilometry of material surfaces
- Prerequisite for comparable optical roughness and waviness analyses | | |