Nano Technology Systems
Eurosemi IC Industry Award 2005
The 1540XB CrossBeam® has won the „Best Tool Award“ within the category „Yield Management“ of Eurosemi IC Industry Award competition. This award has been presented during Semicon West in San Francisco to Dr. Dirk Stenkamp, Managing Director of Nanotechnology Systems Division (NTS) at Carl Zeiss SMT.

Dirk Stenkamp enjoys the excellent reputation that the CrossBeam® has earned: „This is already the 2nd award for our CrossBeam® tool and we are very proud to have been rewarded by this entirely customer driven award. This tool obviously has earned its own reputation as the leading edge failure analysis tool for the global semiconductor industry as well as for research and development in nanotechnology and materials analysis.“



Dr. Dirk Stenkamp and Dr. Peter Gnauck proudly showing the Eurosemi IC Industry award.