Within Carl Zeiss SMT - Nano Technology Systems Division you will find over 40 years experience in developing, designing and manufacturing Scanning Electron Microscopes (SEM). Over these 40 years SEM technology has improved enormously which is clearly evident in today’s leading edge products. The total number of SEMs which has left our factories over all these years is close to 9000.
Brief overview 40 years SEM development:
- First commercial SEM in 1965: Stereoscan Mark I
- 60kV SEM introduced in 1973: Stereoscan 180
- First digital SEM in 1985: ZEISS DSM 950
- First software controlled SEM in 1986: Stereoscan 360
- First GEMINI© FESEM with booster column in 1992: DSM 982
- First Variable Pressure FESEM in 2001: LEO 1530VP
- CrossBeam© introduced in 2002
- First FESEM with dual In-column detectors in 2003
- First CrossBeam© system with dual In-column detector in 2004
- First ULTRA FESEM with complete detection system introduced (2005
Today ZEISS offers an extensive range of analytical SEMs which combine excellent imaging capabilities with full analytical capabilities.
 Press Release
|