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- Design optimisation and fabrication of diffraction gratings according to application-specific requirements
- Simulation of the groove forming processes, the diffraction efficiency, the spectral resolution and the scattered light
- Holographic recording of gratings with symmetrical or blazed grooves
- with uniform or varied line spacing (VLS)
- with aberration correction for monochromator or flat-field spectrometer
- Mechanical ruling of blazed gratings with uniform or varied groove density
- Ion beam etching with noble or reactive gas ions
- to transfer the grating from the photoresist or the ruling layer to the substrate for improved radiation stability
- to modify the groove profile for optimum diffraction efficiency and higher-order suppression
- sinusoidal, trapezoidal or blazed groove profiles
- blaze angles down to 0.1° for X-ray spectrometry
- Multiple gratings on a single substrate
- Measurements of figure accuracy and micro-roughness of the optical substrate surface
- AFM measurements of groove profiles and micro-roughness
- Optical testing to verify groove density, focal properties, spectral resolution, efficiency and scattered light
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