To increase the resolution of the measuring sensor alone is a simple task. But without optimizing the structure and drive that moves the sensor, a simple increase in resolution is no improvement. Conventional drives are composed of a spindle, motor and linear encoder. Due to the nature of the system, there is a certain play that has a negative effect each time the system starts up and brakes, and in the reciprocating motion that is required for 3D topography analysis. The linear drive is constructed play-free. This allows high measurement speeds – exactly in the reciprocating motion in 3D topography analysis. Compared to other systems, the pre-travel can be reduced by up to 60% – this produces enormous benefits with narrow tolerances – even for short possible measurement distances. The play-free linear drive also allows outstanding positioning accuracy that is also required for topography analysis.
The patented linear drive enables maximum measuring speeds from 0.02 – 60 mm/s. For topography measurements, SURFCOM completes measuring jobs up to seven times faster than systems with a spindle drive. This increases the measurement throughput and lowers the risk of interfering variables such as temperature drift.
The linear drive works without any vibrations: the measuring sensor hovers over a magnetic field without establishing contact or friction. The linear drive can achieve best-in-class Rz0 residual values of better than 10 nanometers. Friction means wear. The friction-free linear drive works without wear and manages without spindles and gears – spindle breaks and high maintenance costs are a thing of the past.