Fabricate sub-10nm nanostructures with speed and precision. Seamlessly switch between gallium, neon and helium beams with ORION NanoFab:
With ORION NanoFab you profit from the only system in the world that covers the complete range of micromachining to nanomachining applications using gallium, neon and helium ion beams integrated in a single instrument.
"The Orion Helium Ion Microscope is a unique platform for our research and technology activities in instrument development for nano-analytics, leading to exciting capabilities for cutting edge nano-imaging, nano-analysis and correlative microscopy."
Luxembourg Institute of Science and Technology (LIST),
May 7, 2015
Orion NanoFab features the NanoPatterning and Visualization Engine - an integrated hardware and software control system. NVPE incorporates a dedicated 16 bit scan generator for each NanoFab column and dual signal acquisition hardware supporting real-time advanced patterning and visualization. Completely control the beam by a GUI: create a range of fully editable shapes including rectangles, trapezoids, polygons, lines, polylines, ellipses and spots. Vectorfill these shapes while maintaining full control over dose variation and patterning parameters.
Three Ion Beams for Total Flexibility in Sub10-nm Fabrication
Filesize: 6,184 kB
Três feixes de íons para total Flexibilidade na Fabricação de estruturas inferiores a 10 nm
Filesize: 6,071 kB
Tres haces de iones para una flexibilidad total en procesos de fabricación por debajo de 10 nm
Filesize: 6,270 kB
세 가지 이온 빔으로 10 nm 미만 제작 공정에서 최대의 유연성을 실현
Filesize: 6,555 kB
for High Precision and High Throughput Applications
Filesize: 1,923 kB
Filesize: 2,807 kB
Filesize: 1,425 kB
Filesize: 2,478 kB