Microoptics

In modern optics several demands exist for implementing microstructured optical components.
For example, diffractive optical elements (DOEs) are of considerable advantage in combination with refractive lenses to form so-called hybrid optical systems. The inverse chromatic dispersion of diffraction in contrast to refraction opens new possibilities for the compensation of chromatic aberrations.

Furthermore, the realization of a diffraction grating on a concave optical surface allows the functional integration of imaging and dispersing in one single optical component, which is a key enabler for miniaturization of spectroscopic systems. For more information about gratings, please see also Grating & Grism. In the sophisticated illumination systems microstructured beam shaping elements play an essential role.

Micro- and nanostructures in the subwavelength range open alternative solutions for antireflective properties and polarization management.

  • General Specifications
    • Working wavelength: 193 nm < l <2µm
    • Materials: photoresist, fused silica, glass, Quartz, Si, CaF2 , …
    • Substrate dimensions: 0.5mm to 152.4mm
    • Substrate thickness: 1mm … 10mm
    • Type: single & double-sided
    • Min. Feature size < 10 µm
    • Options: Anti-Reflective coating, metallization and optical mounts
  • Applications
    • Mask illumination
    • Beam shapers / Homogenizers
    • Laser materials processing
    • Laser surgery
    • Industrial measuring systems
  • Standard Products

    Beam shapers

    • Farfield: top hat, gauss, single-line, quadripole, custom
    • FWHM angle: from 1mrad …100mrad
    • Efficiency: > 90 %
    • Low zero order: < 0.1 %

    Microlenses Arrays

    • Array typ: convex, concave
    • Farfield: top hat, single line, custom
    • Microlens diameter: 15µm … 2000 µm
    • Sag: 0.2µm … 10µm
    • Microlens profile: spherical, aspherical, cylindrical, parabolic, ...
    • Array uniformity: <4 % (rms)
    • Fill factor: >99%
    • Surface roughness: <2nm
    • High efficiency: > 90 %

      No missing lenses in optically usable zone