APK 2023
ZEISS Digital Innovation

Meet us at SEMICON Europa 2023

Hall B0, Booth 708

Messe München, Am Messesee 2, 81829 Munich
currently running Meet us at Hall/Booth: B0-708
Over See you next year!
  • 00 years
  • 00 months
  • 00 days
  • 00 hours
  • 00 minutes
  • 00 seconds

Enabling new processes for the digital age

Discover ZEISS software solutions

With our software engineering, we optimise and modernise infrastructures and environmental architectures in the cleanroom. We connect entire production chains, eliminate ineffective isolated solutions and anchor the possibility for cross-location platform architectures on a cloud basis. You benefit from higher quality, production reliability and more efficient use of resources.

You can also experience a comprehensive portfolio of Research Microscopy Solutions with intelligent workflows and virtual reality at our booth in hall B0 at booth 708.


You can meet these colleagues from ZEISS Digital Innovation at SEMICON Europe:

Markus Hoffmann

Jan König

Key Account Manager

Ron Schütze

Ron Schütze

Account Manager


Our talks at SEMICON Europa 2023

Combining Physical and Virtual Metrology for Adaptive Process Control

Virtual metrology, i.e. the prediction of workpiece characteristics using machine and process parameter data, has become common practice in semiconductor manufacturing. However, these digital process twins tend to be quantitatively inaccurate. They sometimes decalibrate over time, especially when environmental conditions are difficult to control or the influences themselves are unknown. In this presentation, we present a generic closed-loop approach that shows how to combine physical and virtual metrology to push the limits of precision manufacturing in terms of accuracy. Following the ultimate goal of autonomous production, process start-up and cycle times can be massively reduced. The degree of automation is increased and process twins can be transferred to other setups.

  • Talk by Dr. Christian Hoerr

Easy Integration of Machine Interface

The OPC-UA standard is ideally suited for creating machine-oriented communication with a software system. In the presentation, a project is presented in which a generic configurable simulation of the interfaces for client and server was provided. This makes it possible to provide communication partners with different behaviors with minimal effort, which are used as counterparts before a real implementation. By integrating the simulator into QA processes, all possible failure cases can be tested without the need to have a real machine available. In this way, many errors are detected before the actual integration into the development process.


Dr. Christian Hörr

Business Development Manager, ZEISS Digital Innovation

Dr. Christian Hörr is responsible for business development in the Manufacturing Solutions business line at ZEISS Digital Innovation. As Principal Expert he coordinates ZEISS-wide activities in the area of advanced manufacturing and production platforms. In his role, he benefits from more than ten years of practical experience as a full-stack developer and development manager in the fields of optical metrology, robotics and automation technology.


Frank Wagner

Consultant and Developer, ZEISS Digital Innovation

Frank Wagner is a consultant and developer at ZEISS Digital Innovation. He is particularly involved in production technology and automation with a focus on the integration of machines based on Microsoft technologies in the semiconductor industry. Clean code, clean architecture and test automation characterize his area of expertise.

Location & Directions - How to get to SEMICON Europa

Messe Munich

Messe München GmbH Messegelände 81823 Munich Germany