ZEISS XENOS uses linear drives on all axes. The benefits: high speeds, very fast acceleration, high positioning accuracy and shear force-free drives. In conjunction with the highresolution scales, the use of linear drives on ZEISS XENOS provide very high path adherence and extremely high positioning accuracy below 100 nanometers. For example, the stylus deflection remains more constant, which results in higher accuracy. Another benefit is evident when measuring curved surfaces: the more reliably and accurately a stylus follows the specified path, the more precisely errors can be determined.