ZEISS Microscopy

Rapid and Large-Scale Sample Preparation for EBSD
using the ZEISS LaserFIB

May 13th | 10 - 11 am CET

ZEISS invites you to a webinar on rapid and large-scale sample preparation for EBSD using the ZEISS LaserFIB

Join our speakers Tim Schubert and Tobias Volkenandt on May 13th at 10 AM CET.

Key Learnings:

  • Explore the technical details of the LaserFIB as the combination of a FIB-SEM with a femtosecond laser system for fast material ablation
  • Learn how the LaserFIB can be used to rapidly prepare large regions of interest for EBSD analysis
  • See for yourself the surface quality of just laser polished cross-sections which is sufficient to generate a decent EBSD signal without the need for FIB post-polishing


With the advent of faster and more sensitive EBSD cameras and high beam current scanning electron microscopes (SEM), the actual EBSD acquisition is no longer the time-limiting factor for studies of grain structure or internal strain. It is now the sample preparation, which is typically done by vibratory polishing or in-situ focussed ion beam (FIB) polishing. Both methods have their limitations when it comes to either site-specificity or preparation of large regions of interest.

In this webinar we present a solution to overcome these limitations using the ZEISS LaserFIB. A LaserFIB is the combination of a FIB-SEM with a femtosecond laser system for fast material ablation. The use of the laser facilitates extremely fast sample machining and surface preparation. Together with the high-resolution imaging and post-polishing capabilities of the FIB-SEM, this enables rapid and precise relocation and preparation of specific regions of interest for EBSD analysis.

We show several real-world examples of metal surfaces suitable for EBSD grain mapping, rapidly prepared using the LaserFIB. The total preparation time for e.g. a 300 x 200 µm large EBSD-suitable region of interest can be as short as 5 minutes. FIB post-polishing can be readily applied in-situ. However, you will see that the surface quality of the just laser polished cross-sections is sufficient for decent EBSD experiments.

Speakers' Profiles

Tim Schubert

Tim Schubert works as a research associate at the Materials Research Institute Aalen (Aalen University). He is a trained materials tester and gained his bachelor’s degree in materialography and his master’s degree in advanced materials and manufacturing both on the topic of additive manufacturing of hard metals. He is currently working on his PhD in the same field. His recent field of work besides additive manufacturing is the application of a variety of microscopic methods in materials research.

Hochschule Aalen für Bild der Wissenschaft Supplement 2017.

Tobias Volkenandt

Tobias Volkenandt studied physics at the Karlsruhe Institute of Technology (KIT) in Germany with a focus on electron microscopy. In 2014 he joined ZEISS as application specialist for FIB-SEM within product management. Since 2017 he has been working as materials science as application development engineer at the business sector materials science. His focus topics are the ZEISS Crossbeam and the new femtosecond laser, as well as software solutions for correlative microscopy and machine learning.

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