ZEISS Microscopy

Introduction to Scanning Thermal Microscopy (SThM)

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Scanning Thermal Microscopy (SThM) performed by an Atomic Force Microscope (AFM) enables thermal characterization of surfaces with lateral resolutions better than 50 nm. An additional capability of SThM, besides this mapping the temperature distribution, is the ability to image the local thermal conductivity.

This is important for designing highly integrated devices. Without careful design of the heat transport paths, active components such as CPUs and LEDs would die within a few milliseconds. Knowledge of heat distribution and thermal conductivity in the nanometer scale helps to find the right strategy for energy transport, in particular when designing new devices.

Download the technology note to learn more about scanning thermal microscopy:

  • Introduction to the Technology
  • Experimental Setup
  • Measurements
  • Summary
Technology Note - Scanning Thermal Microscopy

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