Combine in situ AFM and SEM for Nanomaterials Analysis

The best of both worlds in one – down to atomic level

Get the best of both worlds in a single instrument: combine atomic force microscopy (AFM) with your scanning electron microscope (SEM) or focused ion beam instrument (FIB-SEM). Put AFM performance to work to visualize your sample’s surface topography down to atomic level or measure a wide range of physical properties. Profit from ZEISS Gemini electron optics, tailored to deliver the best results in image quality and sample flexibility.

Atomic force microscopy in a scanning electron microscope allows you to:
  • Add 3D topographical information at the atomic level to your SEM
  • Position the AFM tip on any surface under SEM control
  • Conduct in situ high-resolution measurements of mechanical, electrical, chemical, thermal and magnetic properties
Sample and tip exchange in an atomic force microscope (AFM) within a scanning electron microscope (SEM) through airlock
Sample and tip exchange in the integrated ZEISS AFM-SEM solution through airlock.
Positioning of the AFM tip on the region of interest under SEM guidance. Image, field of view: 3µm.
Positioning of the AFM tip on the region of interest under SEM guidance. Image, field of view: 3µm.
Analysis of surface properties with atomic force microscopy (AFM): magnetic forces on a hard drive.
Analysis of surface properties with AFM-SEM: magnetic forces on a hard drive.
Metallic nano-scaled structure, modified by a focused ion beam (FIB).
FIB modified metallic nano-scaled structure in the AFM-SEM solution.

Discover the AFM-SEM technology from ZEISS

Superb image quality meets high resolution AFM

Laser Deflection AFM

The integrated AFM is a high resolution, sample scanning system that scans a volume of 25 μm × 25 μm × 5 μm and a maximum sample size of 10 mm. The design allows a minimum working distance of 5 mm, which delivers excellent SEM performance and is compatible with FIB-SEM operation.

Schematic setup of the ZEISS atomic force microscope (AFM) design

Gemini SEM Column

ZEISS FE-SEMs and FIB-SEMs are based on Gemini electron optics. The design lets you maximize the electron optical performance while enabling excellent imaging on any sample, allowing high resolution imaging and high signal-to-noise ratios for best image quality.

ZEISS Gemini technology: Schematic cross-section of ZEISS Gemini optical column

ZEISS Integrated AFM

Read the product brochure

Need all the information about the only true in situ AFM Solution from ZEISS? Download the Product Brochure below and go into the details. Learn about advantages of the ZEISS AFM-SEM solution, applications and the technical specifications.

Achieve your moments of discovery

Download the white papers

See what’s possible in nanomaterials research. Download the white papers and learn how to use the power of AFM-SEM to analyze helium ion beam exposed nanostructures. Enable scanning thermal microscopy of surfaces with lateral resolutions better than 50 nm.

Two ZEISS white papers about AFM-SEM in nanomaterials research

White Paper Package

Register and download two white papers

Questions? Get in Touch with Us

Let’s talk about your research

Get in touch with us to find out more about the benefits of ZEISS Microscopy Solutions for your research, book a demo at our customer center, or get a quote. We are looking forward to hearing from you.