Characterization of Nanoparticles with SIMS
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- Explore nanoparticles and, in general, nanofeatures of sizes smaller than 100 nm
- Use Secondary Ion Mass Spectrometer (SIMS) to provide elemental imaging with spatial resolution smaller than 15 nm
- Visualize samples using a helium beam focused to probe sizes less than 1 nm
- Combine high resolution He+ imaging with Ne+ SIMS elemental mapping on the same platform