LaserFIB offer new possibilities for Atom Probe Tomography (APT) sample preparation. They combine rapid machining in the macroscopic scale with most precise FIB machining.
Two workflows are presented for:
1. the preparation of deeply buried ROIs, and
2. the so-called “moat” preparation with extremely high throughput
- The laser allows to prepare APT samples from deeply buried ROIs.
- The laser speeds up the "moat" preparation isolating the ROI rapidly from the bulk.