Unlike TEM/STEM, the finest probe condition that is normally achieved at the highest accelerating voltage does not always give the best resolution in the SEM where bulk specimens are normally used. SEM today has excellent performances at low voltages and implementation of multiple imaging detectors is enabling efficient acquisition of high quality SE and BSE images. By optimising the acceptance of signal electrons, material and topographic contrast can be obtained separately with different SE detectors. Optimisation of collection angle will allow preferential extraction of either atomic number or channelling contrast in the BSE imaging. Furthermore, a latest windowless SDD, whose WD is optimised to that for the imaging sweet spot, enables EDX analyses below 10 nm for a bulk specimen.
- The need to adjust working distance and voltage depending on the material
- Several examples of the data obtainable from the "sweet spot" of WD and voltage
- Realization of x-ray analysis at the imaging "sweet spot"
ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. Use it for your most demanding projects in materials and life science. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. Take sub-nanometer images below 1 kV without an immersion lens.
Explore the new standard for surface imaging after the introduction of ZEISS GeminiSEM 560 with Gemini 3, and its new electron optical engine Smart Autopilot. It delivers the highest resolution in the ZEISS GeminiSEM family at all working conditions.