ZEISS Correlative Research for Structural and Chemical Analysis of Nanoparticles
Providing Quantitative, High Resolution Analysis of Materials on a Nano Level
Highlights
- Visualize nanoparticles and nanomaterials
- Observe the structural information of nanomaterials
- Quantify light elements and functional groups
To enable the detection of nanoparticles and nanomaterials such as Graphene with light microscopy, researchers used the superior polarized light contrast from the ZEISS Axio Imager and combined that with the ZEISS total interference contrast (TIC) module which allows the height detection of nano materials. In a next step correlative microscopy supported the relocation of the graphene flake in the ZEISS FE-SEM to be able to observe its structure and chemical composition. As light elements such as carbon and functional groups attached to it cannot be quantified by EDX, researcher made use of the ZEISS in-situ Raman Microscopy (RISE) and thus gained an understanding of the graphene flake quality.
Detection of Flakes on Big Wafer Using Polarized Light.
Structure, Crack Observation in EM with Inlens Detector.
FE-SEM In-situ Raman Spectroscopy. Identify Layers and Functional Groups.