Scanning Electron & Ion Microscopes

For Scientific and Routine Research

Scanning Electron Microscopes


Scanning Electron Microscopes (SEM) scan a sample with a focused electron beam and get images with information about the samples’ topography and composition.
CSEMs (conventional SEMs with a thermic electron source) and FE-SEMs (field emission SEMs with a field emission electron source) from ZEISS deliver high resolution imaging and superior materials contrast.

  • High resolution surface sensitive information and materials contrast.
  • Widely used in nanotechnology, materials research, life sciences, semiconductor, raw materials and industry.



Focused Ion Beam Scanning Electron Microscopes


Speed up nanotomography and nanofabrication applications.
ZEISS FIB-SEMs let you benefit for processing and sample preparation on a nanoscopic scale for materials in life sciences as well as in industry.

  • Combine 3D imaging, analysis and material processing
  • Profit from a next-generation FIB when preparing your sample
  • Enjoy real-time interaction and perform imaging and milling simultaneously

Multiple Ion Beam Microscopy

Your 3-in-1 Ion Microscope for Sub-10nm Nanostructuring

ORION NanoFab Helium Ion Microscope
The only system in the world that uses gallium, neon and helium ion beams integrated in a single instrument.

  • Image with sub-nm resolution, high surface sensitivity and depth of field
  • Fabricate sub-10nm nanostructures with speed and precision
  • Seamlessly switch between gallium, neon and helium beams