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ZEISS EVO
Scanning Electron Microscope
ZEISS EVO Family
Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications
The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.
- Versatile solution for central microscopy facilities or industrial quality assurance laboratories
- Different chamber sizes and stage options that meet all application requirements – even for large industrial parts and samples
- Maximum image quality with the Lanthanum Hexaboride (LaB6) emitter
- Imaging and analytical excellence on non-conductive and uncoated samples
- Multiple analytical detectors for demanding microanalysis applications
Highlights
Your Advantages

Class-Leading Usability

Excellent Image Quality

EVO plays well with others
Get More Hands on Deck
Easy Operation for Both Experienced and Novice Users
Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. EVO takes both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-micoscopists.

Expert users
Preferred UI: SmartSEMExpert users have access to advanced imaging parameters and analysis functions.


Novice users
Preferred UI: SmartSEM TouchNovice users have access to predefined workflows and the most frequently used parameters – perfect for a beginner.

Intelligent Navigation and Imaging
Improve Your Sample Throughput, Productivity and Performance

ZEISS Navigation Camera
A camera can be mounted either to the chamber to monitor the position of the samples relative to the pole piece mounted backscattered detector (chamberscope); or on the vacuum chamber door (navigation camera) to enable a helicopter view of the arrangement of samples or parts on the sample holder. This view can then be used to set up predefined locations of interest identified from a light microscope image, and for easy navigation during the entire sample investigation process.

Automated Intelligent Imaging
EVO enables automated, unattended acquisition of images across sample batches. ZEISS Automated Intelligent Imaging is perfectly suited to routine inspection. It enables the user to define a boundary region, automatically generate regions of interest determined by the required field of view or magnification, and begin automated acquisition. Automated Intelligent Imaging will improve your sample throughput, boosting productivity and performance.
Take Your Investigation to the Next Level
Better Data with a Lanthanum Hexaboride (LaB6) Electron Emitter
Electron emission from a lanthanum hexaboride cathode, rather than a traditional tungsten hairpin filament, provides the reassurance that every extra bit of image quality is there when you need it. And that is a benefit you can put into action in two ways:
- At equivalent electron probe sizes (i.e. resolution), there is more probe current to work with, which makes image navigation and optimization much easier.
- At equivalent probe currents (signal-to-noise), the beam diameter is much smaller, resulting in enhanced image resolution.


EVO Plays Well with Others.
Benefit from Workflow Automation and Correlative Microscopy

With ZEISS being the leading supplier of a wide range of microscopy and metrology systems, you can expect EVO to play extremely well with other ZEISS solutions.
With Shuttle & Find, the ZEISS hardware and software interface for correlative microscopy, you can establish a highly-productive multi-modal workflow between (digital) light microscopes and EVO. Combine the unique optical contrast methods of your light microscope with the equally unique imaging and analytical methods of SEM to obtain complementary data, and hence more meaningful information about the material, quality or failure mechanism of your sample.
ZEISS SmartEDX
Embedded EDS Solution for Routine SEM Microanalysis Applications
If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.

- Optimized for routine microanalysis applications
SEM and EDS have to be paired with careful consideration. SmartEDX on EVO is ideally suited for routine microanalysis applications, particularly for customers with high standards for data reproducibility. It provides highest throughput at 129 eV energy resolution and 1-5 nA probe current – typical EVO operating condition. SmartEDX is optimized to detect low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window.

- Workflow-guided graphical user interface
SmartEDX is developed to improve both ease of use and workflow repeatability in multi-user environments. Like other ZEISS workflow-guided software solutions, such as SmartSEM Touch, ZEN core, or Shuttle & Find for EVO, the SmartEDX software is easy to learn, intuitive to use, and helps ensure repeatable execution of analytical tasks on the SEM, particularly in environments where more than one operator will be using the system.

- Total ZEISS service and system support
Because SmartEDX is supported entirely by ZEISS, this EDS solution is ideal for customers with a vested interest in streamlining their number of analytical equipment suppliers. All installation, preventive maintenance, warranty, diagnostics and repair, spare part logistics, and inclusion in total system service contracts are fully handled by ZEISS, making support of your analytical SEM solution easy.
The EVO Family
Vacuum Chamber Size Options
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ZEISS EVO 10 |
ZEISS EVO 15 |
ZEISS EVO 25 |
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Choose EVO 10—with optional backscatter detector and Element EDS system—to be your entry point to scanning electron microscopy, at a remarkably affordable price. Even this smallest of EVO vacuum chambers is well differentiated from tabletop SEMs. Your investment in EVO now assures that you are ready for applications that require more space and ports than you anticipate today. |
EVO 15 demonstrates the flexibility concept of the EVO family and excels in analytical applications. Opt for the larger vacuum chamber of the EVO 15, and add variable pressure for imaging and analysis of non-conductive samples or parts, and you have a versatile, multi-purpose solution for central microscopy facilities or industrial quality assurance laboratories. |
EVO 25 is the industrial workhorse solution with enough space to accommodate even the largest parts and assemblies. Expand EVO 25 capabilities further with an optional 80 mm Z travel stage that can handle weights up to 2 kg even with tilt. Additionally, the large chamber will accommodate multiple analytical detectors for the most demanding microanalysis applications. |
Maximum specimen heights |
100 mm |
145 mm |
210 mm |
Maximum specimen diameter |
230 mm |
250 mm |
300 mm |
Motorized stage travel XYZ |
80 x 100 x 35 mm |
125 x 125 x 50 mm |
130 x 130 x 50 (or 80) mm |
High Vacuum (HV) mode |
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Variable Pressure (VP) mode |
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Extended Pressure (EP) mode |
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ZEISS EVO at Work
Application Examples
Manufacturing & Assembly Industries
- Quality analysis / quality control
- Failure analysis / metallography
- Cleanliness inspection
- Morphological and chemical analysis of particles to meet ISO 16232 and VDA 19 part 1 & 2 standards
- Analysis of non-metallic inclusions



Semiconductors & Electronics
- Visual inspection of electronic components, integrated circuits, MEMS devices and solar cells
- Copper wire surface and crystal structure investigation
- Metal corrosion investigations
- Cross-sectional failure analysis
- Bonding foot inspections
- Capacitor surface imaging



Steel and other Metals
- Imaging and analysis of the structure, chemistry and crystallography of metallic samples and inclusions
- Phase, particle, weld and failure analysis



Raw Materials
- Morphology, mineralogy and compositional analysis of geological samples
- Imaging and analysis of the structure of metals, fractures, and nonmetallic inclusions
- Morphological and compositional analysis of raw chemicals and active ingredients during micronization and granulation processes



Materials Science Research
- Characterization of both conductive and non-conductive material samples for research purposes



Life Sciences
- Research into plants, animals and micro-organisms



Forensics
- Gunshot residue (GSR)
- Paint and glass analysis
- Bank note and coin forgery
- Hair and fiber comparisons
- Forensic toxicology



Downloads
ZEISS EVO
Your Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications
pages: 34
file size: 11890 kB
ZEISS SmartEDX
The ZEISS Embedded EDS Solution for Your Routine SEM Microanalysis Applications
pages: 10
file size: 2160 kB
Use Case: ZEISS Microscopes in Restoration and Conservation
The Imperial Carriage Museum in Vienna, Austria
pages: 7
file size: 1755 kB
Using ZEISS SmartSEM Touch
for Fast and Reproducible Routine Inspection
pages: 6
file size: 2556 kB
White Paper
ZEISS EVO MA and LS Fisheye OptiBeam Mode
pages: 6
file size: 591 kB
White Paper: Python Blood Analysis by STEM
pages: 7
file size: 5370 kB
Application Note: Enhancing Material Inspection and Characterization Information and Data Integrity
By Combining Light and Scanning Electron Microscopy in a Correlative Workflow
pages: 8
file size: 1456 kB
Concrete Crack Self-healing Materials Micro Structure Investigation
pages: 5
file size: 1974 kB
White Paper: Beam Deceleration Imaging with ZEISS EVO
Receive high quality images with enhanced surface contrast and topographical detail for low kV imaging and life science samples
pages: 6
file size: 845 kB
White Paper: Coolstage benefits on ZEISS EVO
pages: 6
file size: 5020 kB
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