ZEISS EVO

Scanning Electron Microscope

ZEISS EVO Family

Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

Versatile solution for central microscopy facilities or industrial quality assurance laboratories
Different chamber sizes and stage options that meet all application requirements – even for large industrial parts and samples
Maximum image quality with the Lanthanum Hexaboride (LaB6) emitter
Imaging and analytical excellence on non-conductive and uncoated samples
Multiple analytical detectors for demanding microanalysis applications

Highlights

Your Advantages

Class-Leading Usability

SmartSEM Touch puts interactive workflow control directly at your fingertips. It is quick and easy to learn, dramatically reducing training effort and costs. Within minutes, even new users will begin capturing stunning images. This user interface also supports industrial operators who require automated workflows for repeatable inspection tasks.

Excellent Image Quality

EVO excels at extracting the maximum data quality from uncoated and unaltered samples. EVO also safeguards data quality on hydrated and heavily contaminated samples, by allowing these samples to remain in their native state. Additionally, the LaB6 emitter will give that extra bit of resolution, contrast and signal-to-noise that is important when imaging and microanalysis get challenging.

EVO plays well with others

EVO can be configured to be part of a semi-automated multi-modal workflow, with tools for seamless relocation of regions of interest and integrity of data collected from multiple modalities. Combine light and electron microscope data for material characterization or parts inspection. Or combine EVO with ZEISS light microscopes for correlative particle analysis.

Get More Hands on Deck

Easy Operation for Both Experienced and Novice Users

Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. EVO takes both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-micoscopists.

Expert users

Preferred UI: SmartSEM

Expert users have access to advanced imaging parameters and analysis functions.

SmartSEM: Interface and controller for experienced users

Novice users

Preferred UI: SmartSEM Touch

Novice users have access to predefined workflows and the most frequently used parameters – perfect for a beginner.

SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC

Intelligent Navigation and Imaging

Improve Your Sample Throughput, Productivity and Performance

ZEISS Navigation Camera
A camera can be mounted either to the chamber to monitor the position of the samples relative to the pole piece mounted backscattered detector (chamberscope); or on the vacuum chamber door (navigation camera) to enable a helicopter view of the arrangement of samples or parts on the sample holder. This view can then be used to set up predefined locations of interest identified from a light microscope image, and for easy navigation during the entire sample investigation process.

Automated Intelligent Imaging
EVO enables automated, unattended acquisition of images across sample batches. ZEISS Automated Intelligent Imaging is perfectly suited to routine inspection. It enables the user to define a boundary region, automatically generate regions of interest determined by the required field of view or magnification, and begin automated acquisition. Automated Intelligent Imaging will improve your sample throughput, boosting productivity and performance.

Take Your Investigation to the Next Level

Better Data with a Lanthanum Hexaboride (LaB₆) Electron Emitter

Electron emission from a lanthanum hexaboride cathode, rather than a traditional tungsten hairpin filament, provides the reassurance that every extra bit of image quality is there when you need it. And that is a benefit you can put into action in two ways:

At equivalent electron probe sizes (i.e. resolution), there is more probe current to work with, which makes image navigation and optimization much easier.
At equivalent probe currents (signal-to-noise), the beam diameter is much smaller, resulting in enhanced image resolution.

Catalyst particles imaged at high magnification and low kV (left: Tungsten, right: LaB6).

At challenging imaging conditions, LaB6 users benefit from up to 10 times more beam brightness, resulting in improved image resolution and contrast.

EVO Plays Well with Others.

Benefit from Workflow Automation and Correlative Microscopy

Shuttle & Find integrates EVO, compound light microscopes and digital microscopes into a correlative, multi-modal workflow

With ZEISS being the leading supplier of a wide range of microscopy and metrology systems, you can expect EVO to play extremely well with other ZEISS solutions.

With Shuttle & Find, the ZEISS hardware and software interface for correlative microscopy, you can establish a highly-productive multi-modal workflow between (digital) light microscopes and EVO. Combine the unique optical contrast methods of your light microscope with the equally unique imaging and analytical methods of SEM to obtain complementary data, and hence more meaningful information about the material, quality or failure mechanism of your sample.

ZEISS SmartEDX

Embedded EDS Solution for Routine SEM Microanalysis Applications

If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.

Optimized for routine microanalysis applications
SEM and EDS have to be paired with careful consideration. SmartEDX on EVO is ideally suited for routine microanalysis applications, particularly for customers with high standards for data reproducibility. It provides highest throughput at 129 eV energy resolution and 1-5 nA probe current – typical EVO operating condition. SmartEDX is optimized to detect low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window.

Workflow-guided graphical user interface

Workflow-guided graphical user interface
SmartEDX is developed to improve both ease of use and workflow repeatability in multi-user environments. Like other ZEISS workflow-guided software solutions, such as SmartSEM Touch, ZEN core, or Shuttle & Find for EVO, the SmartEDX software is easy to learn, intuitive to use, and helps ensure repeatable execution of analytical tasks on the SEM, particularly in environments where more than one operator will be using the system.

Total ZEISS service and system support

Because SmartEDX is supported entirely by ZEISS, this EDS solution is ideal for customers with a vested interest in streamlining their number of analytical equipment suppliers. All installation, preventive maintenance, warranty, diagnostics and repair, spare part logistics, and inclusion in total system service contracts are fully handled by ZEISS, making support of your analytical SEM solution easy.

Mineralogic

Automated mineralogy

Phase identification and textural analysis in 2D and 3D using ZEISS SEM, XRM, and microCT systems.

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The EVO Family

Vacuum Chamber Size Options

	ZEISS EVO 10	ZEISS EVO 15	ZEISS EVO 25
	Choose EVO 10—with optional backscatter detector and Element EDS system—to be your entry point to scanning electron microscopy, at a remarkably affordable price. Even this smallest of EVO vacuum chambers is well differentiated from tabletop SEMs. Your investment in EVO now assures that you are ready for applications that require more space and ports than you anticipate today.	EVO 15 demonstrates the flexibility concept of the EVO family and excels in analytical applications. Opt for the larger vacuum chamber of the EVO 15, and add variable pressure for imaging and analysis of non-conductive samples or parts, and you have a versatile, multi-purpose solution for central microscopy facilities or industrial quality assurance laboratories.	EVO 25 is the industrial workhorse solution with enough space to accommodate even the largest parts and assemblies. Expand EVO 25 capabilities further with an optional 80 mm Z travel stage that can handle weights up to 2 kg even with tilt. Additionally, the large chamber will accommodate multiple analytical detectors for the most demanding microanalysis applications.
Maximum specimen heights	100 mm	145 mm	210 mm
Maximum specimen diameter	230 mm	250 mm	300 mm
Motorized stage travel XYZ	80 x 100 x 35 mm	125 x 125 x 50 mm	130 x 130 x 50 (or 80) mm
High Vacuum (HV) mode Best quality imaging and analysis on conductive samples
Variable Pressure (VP) mode High quality imaging and analysis on uncoated, non-conductive samples
Extended Pressure (EP) mode Environmental imaging of hydrated or contaminated samples in their natural state

ZEISS EVO at Work

Application Examples

Manufacturing & Assembly Industries

Quality analysis / quality control
Failure analysis / metallography
Cleanliness inspection
Morphological and chemical analysis of particles to meet ISO 16232 and VDA 19 part 1 & 2 standards
Analysis of non-metallic inclusions

Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

$Stainless steel fracture surface, imaged with secondary electrons in high vacuum.$

Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

Semiconductors & Electronics

Visual inspection of electronic components, integrated circuits, MEMS devices and solar cells
Copper wire surface and crystal structure investigation
Metal corrosion investigations
Cross-sectional failure analysis
Bonding foot inspections
Capacitor surface imaging

Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

Corroded Nickel layer imaged with secondary electrons

SE image revealing whisker growth on an electronic device.

Steel and other Metals

Imaging and analysis of the structure, chemistry and crystallography of metallic samples and inclusions
Phase, particle, weld and failure analysis

Cross section of galvanised mild steel, imaged using the SE detector on EVO 15.

Surface of S355 steel after grit blasting with F80 grit alumina.

Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

Raw Materials

Morphology, mineralogy and compositional analysis of geological samples
Imaging and analysis of the structure of metals, fractures, and nonmetallic inclusions
Morphological and compositional analysis of raw chemicals and active ingredients during micronization and granulation processes

Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen

Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK

Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

Materials Science Research

Characterization of both conductive and non-conductive material samples for research purposes

Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.