C-SEM Upgrades for an Increased Life Time and Extended Functionality

ZEISS Beam Deceleration is an improved EVO conventional scanning electron microscope (C-SEM) sample bias module which enables beam deceleration imaging with enhanced surface contrast and topographical detail in combination with a BSD detector.

The Cascade Current Detector (C2D) replaces the VPSE G3 and VPSE G4 to enable very low kV imaging in variable pressure (VP) mode. Images at 1 - 3 kV are now far more effectively captured.

The Extended Range Cascade Current Detector (C2DX) is a detector unique to the EVO Series and is designed to provide superb imaging performance at the highest pressure up to 3000 Pa.

The ZEISS YAG (Yttrium Aluminum Garnet) single crystal scintillator BSD detector enables a higher efficiency of light conductance, which is ideal for low signal imaging. The material which is free of radiation damage turns the YAG BSD into a detector, suitable for all beam energy ranges.

The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.

The fourth generation Variable Pressure SE detector (VPSE G4) convinces with its improved collection signal and thereby a faster response time. Higher scan speeds enable you an increasement of productivity. VPSE G4 provides 20% more contrast up to 400 Pa pressure (at 20 keV).

This upgrade enables high sample throughput and thereby extends the information limit of your EVO system. The significantly lower electron beam energies used in the SEM result in reduced excited volume and increased cross sections at lower accelerating voltages.

ZEISS Atlas 5 makes your life easier: create comprehensive multiscale, multi-modal images with a sample-centric correlative environment.

The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.

Smart Particle Investigator (SmartPI), your advanced particle analysis and classification solution turns scanning electron microscopes (SEM) into turnkey solutions for industrial cleanliness or metal and steel applications.

Add new and improve existing functionality through our broad range of licenses which will help you to improve your processes, ease the use of your system and have tools to receive more information.

With Shuttle & Find you connect your electron microscope and light microscope from ZEISS. The combined hardware and software solution enables you to transfer your specimen from one microscope system to another within just minutes.

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools.

ZEISS offers you a fast and cost-efficient solution for specimen and chamber decontamination. A Plasma Cleaner is used to generate reactive gas-phase radicals in a plasma. The radicals migrate into the instrument chamber and chemically react with the unwanted hydrocarbons.

By using Vac Quiet Mode and with help from a vacuum reservoir the pre-pump is automatically switched off after reaching a factory pre-set vacuum level. The vacuum reservoir allows the system to be operated for hours without the need of the pre-pump. This results in both the reduction of noise levels and energy consumption.

An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.

With the Dual Joystick Controller and the Control Panel installed, operating becomes much more comfortable. The Dual Joystick Controller can be used for stage control and specimen navigation and the Control Panel gives you easy access to the most frequently used functions of the SEM.