Nanofabrication & Nanotechnology

Design and Manufacturing in the Nano World

Nanofabrication is the design and manufacturing of devices with dimensions measured in nanometers. If you need to create such small structures, charged particles like ions or electrons are often your method of choice. The interaction between the ion or electron beam and the sample surface allows you to manipulate structures or properties of the surface. When used in combination with different gases, you are able to perform complex processes such as etching or material deposition. This enables creation of superior new materials and systems with complex mechanical, electronic, optical, magnetic or fluidic functions.

Nanofabrication, Patterning and Lithography

Todays and future applications require materials with improved electronic, magnetic, optical and mechanical properties. Many of these properties are defined by the structure and composition in the size range below 100 nm. Carl Zeiss is the only supplier that offers solutions for the fabrication of structures from the millimeter to the nanometer range. For the fabrication of sub-10 nm structures with high aspect ratios you use ORION NanoFab Multi-Ion Microscope. The advantage of this technology is that helium and neon ion beam lithography don’t exhibit proximity effects. You achieve uniform nested patterns without dose modification to account for proximity effects.

Nanophotonics, Plasmonics and Metamaterials

Metamaterials are a class of artificial materials, where the optical or magnetic properties are modified by changing the structure of the surface. Photonic crystal structures allow to improve the properties of optical devices. These are useful in all products for light transmission and optical measurement. The FIB patterning solution offers a powerful package to create these kind of structures. ORION NanoFab is your tool of choice for applications that require creation of plasmonic structures that exhibit surface or localized plasmon response at optical frequencies or higher frequency ranges.

Graphene Research

Graphene is a very promising next generation material. When made into specific shapes, you are able to modulate certain properties such as the bandgap. Graphene is a very delicate material because it is single atom thick and requires very gentle machining. Using the gentle and precise machining capability of ORION NanoFab, you create complex graphene devices with sub-10 nm features.


Nanoparticles are of great importance in the field of catalysis or for modern nano-material applications. Your goal is usually a characterization of size, shape, chemical composition and distribution on a nm- or even sub-nm scale. You investigate the important features of your nanoparticles down to smallest sizes. ATLAS 3D allows large volume acquisition of your sample at highest resolution. This enables you to find specific nanoparticles within a polymer matrix and lets you analyse them.


Nanopores with diameters less than 10 nm are necessary for realization of advanced devices with applications in diverse areas. These include chemical sensing, DNA sequencing, biomolecule filtration, biomolecule sensing and X-ray holography. ORION NanoFab enables direct fabrication of nanopores with diameters as small as 4 nm and high aspect ratios of 10:1 or more.

Recommended Products for Nanofabrication

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