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Benefits of Low Voltage Backscatter Imaging on ZEISS GeminiSEM Family
Do you want to get materials contrast out of your sample and hesitate to go for higher landing energies because you do not want to sacrifice resolution over contrast? This paper shows the benefits of low voltage imaging with two different methods in field emissions SEMs from the ZEISS GeminiSEM family. Discover how to gain compositional and topographical information with the help of two different backscatter detectors and how to make best use of biasing your sample to optimize your applications images.