Leveraging The Imaging Capabilities of the ZEISS Gemini FESEM On Semiconducutor Materials and Samples

The ZEISS GeminiSEM series FESEMs allow magnetic, field-free imaging below 1kV without any sample biasing, even at high resolutions. The direct benefit to the end user is the ease of use in changing and tuning beam conditions, especially when imaging below 1kV.

In this workshop, the various methods and techniques required for imaging a variety of challenging semiconductor samples will be covered, including imaging of negative / positive photoresist, die-level passive voltage contrast (PVC) imaging and high-resolution STEM imaging. Some background theory and practical steps will be demonstrated on the mentioned samples.

This 3-hour virtual workshop consists of a single session, streamed live from ZEISS Microscopy Customer Center (ZMCC) in Dublin, CA. Through screen sharing on the instrument and multiple cameras, the complete operation of the instrument will be visible as our SEM Applications experts cover a full itinerary of training topics.

It is recommended that attendees secure time on their instruments after the workshop to apply the shared methods on their own samples. Attendees are strongly encouraged to share their images from individual sessions and interact with our Applications Team through independent email threads for additional assistance and refinement of imaging techniques.

Who should attend?​

• Existing or prospective users of ZEISS FESEMs interested in optimization of SEM imaging on challenging semiconductor samples and materials.
• Existing users of ZEISS GeminiSEM series microscopes looking to improve their current skillset and better support and/or train others.
• Lab managers, engineers or technicians looking to enhance their knowledge of SEM imaging methods used on advanced semiconductor samples

Learning objectives: after completion of this workshop, attendees should:​

• Benefit from a new perspective for how to approach SEM imaging on a variety of challenging semiconductor samples.
• Improve your understanding of the methods and challenges related to imaging different types of semiconductor samples, particularly those that require imaging at very low kV.
• Gain experience about how to leverage SEM imaging using different detectors and methods

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This is a paid workshop. ​

Spots are limited.