ZEISS Evening Tutorial at Microscopy & Microanalysis (M&M) 2019

Tuesday, August 6, 2019 – 5:45 pm - 6:45 pm

A Sneak Preview of the Latest Atlas 5 2D & 3D Features for Crossbeam and SEM Microscopes
Michael W. Phaneuf and Alexandre Laquerre
Fibics Incorporated, Ottawa, Ontario, Canada

ZEISS Atlas 5 has become the premiere 2D and 3D imaging, tomography and correlation tool on FE-SEMs and FIB/SEM microscopes, with research applications ranging from the Biological and Materials Sciences to industrial applications including advanced semiconductor analysis. Recent developments and upcoming features will be presented, focusing on applications of the ZEISS Crossbeam microscope family, but in many cases applicable to all SEMs.

Topics include 3D workflows between X-ray and Crossbeam microscopes, 3D FIB/SEM tomography from cubic millimeter volumes to nanometer‎ voxels, 3D analytics, sectioning-and-imaging at high throughput and the impact on the fidelity of your tomographic data of novel beam control strategies plus the “True-Z” measurement of slice thickness during FIB/SEM Tomography.

The latest advancements of the ZEISS Atlas 5 Correlative Workspace, bringing together multi-modal (light, electron, ion and analytical), multi-microscope analysis of the same specimen, and allowing users to share information using standard Web Browser formats, will be summarized.

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