ZEISS Evening Tutorial at Microscopy & Microanalysis (M&M) 2019

Wednesday, August 7, 2019 – 5:45 pm - 6:45 pm

“Nice image, what am I looking at?” -
Nano-analysis on the HIM using the VECTOR500 SIMS
David Dowsett
Lion Nano-Systems, Technoport 2, rue du Commerce, L-3895 Foetz, Luxembourg


The ORION NanoFab is now a well established multi-beam tool for nano-imaging and nano-fabrication. The addition of nano-analytics using the VECTOR500 SIMS completes the trinity of user needs (I want to see nanoscale objects, I want to make nanoscale objects and I want to analyse nanoscale objects).

There are a number of challenges that must be overcome when trying to analyse nanoscale volumes. To enable high spatial resolution, high sensitivity secondary ion mass spectrometry (SIMS) on the NanoFab, a custom spectrometer the VECTOR500 has been designed to tackle each of these.

In this talk, I will outline the advantages of SIMS analysis using the VECTOR500, detailing the highlights of the technique, the types of analysis possible on the NanoFab
I will review the latest applications in multiple fields (materials science, life sciences, semiconductor, battery development) with real world user stories detailing the advantages of the NanoFab-SIMS.

Figure 1. 22nm finFET deprocessed to reveal multiple layers imaged using SIMS and SEs. Image courtesy of ZEISS.

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