ZEISS XRM University

Part of ZEISS Microscopy Customer Center(ZMCC) Skill Builder Series


X-ray Microscopy 201: Using Your X-ray Microscope for Semiconductor & Electronics Applications

January 27, 2022 10:00 am - 1:00 pm PST

This workshop is an introductory course for users of ZEISS Xradia Versa X-ray microscopes focused on electronics samples. This is a 3-hour workshop with a short break during which participants conduct optional hands-on operation on their own instruments.

Topics that will be covered in this workshop include:

  1. Best practices for sample mounting for electronic devices and packages: selecting the best sample holders and positioning your region of interest or fault within the field of view
  2. Scout and Zoom: a multiscale 3D imaging approach to navigate and visualize your region of interest
  3. Optimizing scan parameters for data quality and speed: sample rotation angle, drift correction, number of projections, intensity, and high aspect ratio tomography (HART)
  4. Optimizing results using manual reconstruction: center shift and beam hardening corrections

    15-minute break

  5. Q & A

The attendees are expected to be familiar with the general procedure of setting up tomography scans on Xradia Versa.

Who should attend?
  • XRM users focused on electronic device characterization, semiconductor package development or failure analysis
    - Active users of ZEISS Xradia Versa instruments
    - Infrequent Versa users in need of a refresh on scan setup and optimization
    - Lab managers or technicians looking to improve their own skill level to better support and/or train other users of the instrument
Learning Objectives
After completion of this workshop, attendees should
  • Have an improved understanding of best practices for sample and scan setups focused on electronics
  • Improve their parameter selection to optimize the quality and throughput of their Versa scan
  • Be able to efficiently navigate within their sample to accurately target the correct region of interest for high resolution scanning
This is a paid workshop.
Spots are limited.
Access to a Versa system before and after the training is strongly recommended