Learn SEM fundamentals and get hands on training with ZEISS EVO SEM. See below for an outline of the 3-day workshop and to register for the workshop. Space is limited.
We will begin with a review of some fundamental principles to ensure that each user understands the effects of changing SEM parameters such as accelerating voltage, probe current and working distance on image quality. We will review beam formation, beam-specimen interactions, specimen charging and the selection of detectors in image formation. When appropriate, the significant differences between early generation EVO’s and the latest design will be discussed.
The time required for this workshop will depend on the user’s background; it can be omitted or abbreviated for users with previous SEM experience.
Operation of the EVO® SEM will include a physical description of the instrument, powering the instrument, logging-on and components of the Graphical User Interface (GUIF) and screen display.
We will perform a normal gun run up and alignment. We will do a complete system check of all beam and detector functions. Topics in this session will include aperture selection and recovery from lost beam, parameter adjustments with the mouse, joystick, control panel, keyboard and tool bar icons functions. We will also examine magnification-focus, brightness-contrast, and scan rate and astigmatism correction.
The following fundamental operating modes will be covered:
- High resolution, low probe current imaging
- High depth of field and wide field imaging
- Low voltage imaging in high vacuum
- Backscatter electron detection (both compositional and topographic imaging)
- Variable pressure imaging using the backscatter and C2D VPSE detectors (If applicable)
- Optibeam EZ-VP Mode (New to EVOs 2014!)
Details of the user interface will be introduced along with some extensive software selections. These include help topics, pre-defined lists, annotation, toolbar icons, pull down menu functions, dialog panels including stage navigation, safe navigation and image navigation dialogs. Image Navigation from door mounted Nav. Cam (New 2018!) and external cameras and images will be performed.
Exporting and importing images, zone control and user defined preferences will be discussed and practiced along with printing images and image store resolution. Selected advanced features of the SmartSEM software will be introduced such as the tool bar editor, hot keys, macro editor, image processing and stage functions.
Late in the afternoon we will change the tungsten source to LaB6 (when applicable). Enabling the ion getter pump (IGP), bake-out and the gun monitor will be reviewed.
Our morning will begin with a review of day one material along with a discussion of normal gun run up and systematic check of the SEM functions. The user will run the SEM and practice what was previously introduced. Resolution and image quality associated with SEM parameter changes and specimen interaction will be reinforced.
Before lunch we will cover changing tungsten and LaB6 filaments as well as specific gun run up and alignments. We also cover trouble-shooting, cleaning and replacing the fixed apertures.
The afternoon will be a hands-on session and a chance for users to pose specific questions while they run the instrument. This session may also allow imaging on customers’ samples if they are instructional for all.
If applicable to the group, day three is partially devoted to the ZEISS SmartEDX microanalysis system and other special topics such as:
- Quantitative Microanalysis with SmartEDX and other EDS systems
- Correlative Microscopy: Correlative Light and Electron Microscopy with Shuttle & Find
- Remote SEM: Remote operation of the SEM using Webex, UltraVNC and other shared desktop applications.
- SEM Automation using ATLAS, ATLAS Array Tomography, Smartstitch & or Automated Intelligent Imaging Software: Automated unattended image acquisition and mosaics.
- STEM Imaging: Low voltage scanning transmission electron microscopy with the SEM.
- CL Imaging: Acquiring images from samples that produce cathodoluminescence.