New Protocols for the Fabrication of Atom Probe Specimens with LaserFIBs

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Dr. Fabián Pérez Willard Materials Science Sector Solutions Manager Nanoscience & Nanomaterials
ZEISS Microscopy

LaserFIB offer new possibilities for Atom Probe Tomography (APT) sample preparation. They combine rapid machining in the macroscopic scale with most precise FIB machining.

Two workflows are presented for:
1. the preparation of deeply buried ROIs, and
2. the so-called “moat” preparation with extremely high throughput

Key Learnings:

  • The laser allows to prepare APT samples from deeply buried ROIs.
  • The laser speeds up the "moat" preparation isolating the ROI rapidly from the bulk.


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