Your Software Solution for SEM, FE-SEM and FIB-SEM

Use SmartSEM to Fully Control All Operational Parameters. Choose between different operating modes for the GUI depending on your user level: full control of all operating parameters allows you to set certain levels of software control for different users. Or concise GUI developed for the occasional user with the major operating controls in one conveniently arranged control bar for ease of operation and increased productivity. Extend the functionality easily at anytime with extra modules for comprehensive image acquisition, processing, analysis and documentation.

ZEISS Microscopy Developer Community




  • Process extensive signals during acquisition or on stored images
  • Use full annotation and measurement capabilities
  • Save operating conditions at any time for future recall
  • Use the Macro-Editor with access to over 250 instrument control functions
  • Profit from the comprehensive stage control


  • Use SmartPI module to quantify, classify and measure particle size, shape, morphology and elemental composition semi-automatically
  • Easily switch between different modes for production, configuration and report
  • Production mode: SmartPI automatically sets up the operating conditions and starts the measurement according the selected analysis routine
  • Configuration mode: Easily configure the relevant settings from SEM setup to particle classification and report
  • Report mode: Create reports, process data and work with single frame interactive analysis with anomaly investigation


  • Combine images taken using a variety of different detectors at different magnifications to present large image sets in the context of the sample
  • Easily browse and navigate your image collection by stage coordinate references
  • Unlock hidden information with different filtering mechanisms and viewing modes
  • Handle tilt series creating the impression of a 3D rotation to get a better understanding of your sample
  • Access image properties with all system parameters