ZEISS Sigma Family
Sigma Family

ZEISS Sigma Family

Your ZEISS SIGMA FE-SEMs for High Quality Imaging and Advanced Analytical Microscopy

ZEISS Sigma 300 delivers excellence in price and performance. Achieve your elemental analysis fast and convenient with the best-in-class EDS geometry of ZEISS Sigma 500. Count on accurate, reproducible results – from any sample, every time.

Flexible Detection. 4-Step Workflow. Advanced Analytics.

Combine field emission SEM (FE-SEM) technology with advanced analytics. Profit from proven Gemini electron optics. Choose from a variety of detector options: you can image particles, surfaces, and nanostructures. Save time with the semi-automated 4-step workflow of Sigma: structure your imaging and analysis routines and increase productivity.


Fibers, used in antimicrobical dressings in wound care.

Flexible Detection for Clear Images

  • Tailor Sigma to your needs using the latest detection technology and characterize all of your samples.
  • Acquire topographical and compositional information with the optional InLens Duo detector.
  • Enjoy a new generation of secondary electron (SE) detectors. Obtain images with up to 50% more signal. Benefit from the novel C2D and VPSE detectors of Sigma in variable pressure mode: working at low vacuum, you can expect crisp images with up to 85% more contrast.
Save time with Sigma’s 4-step workflow.

Automate and Speed up Your Workflow

  • A 4-step workflow lets you control all the functionality of your Sigma. Benefit from fast time-to-image and save time on training - especially in a multi-user environment.
  • First, navigate your sample and then set optimal imaging conditions.
  • Next, automatically acquire images across multiple samples utilizing regions of interest (ROIs). Finally use the workflow’s last step for contextual visualization of your results.
Speed up X-ray analyses with best-in-class EDS geometry.

Perform Advanced Analytical Microscopy

  • Combine scanning electron microscopy and elemental analytics: the best-in-class EDS geometry of Sigma increases your analytical productivity, especially on beam sensitive samples.
  • Get analytical data at half the probe current and twice the speed. 
  • Achieve complete, shadow-free analytics in your FE-SEM. Profit from using a short analytical working distance of 8.5 mm and a take-off angle of 35°.

Gemini Optics

Schematic cross section of Gemini optical column.

Based on Proven Gemini Technology

  • The Gemini objective lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials.
  • The Gemini in-lens detection concept ensures efficient signal detection by detecting secondary (SE) and/or backscattered (BSE) electrons minimizing time-to-image.
  • Gemini beam booster technology guarantees small probe sizes and high signal-to-noise ratios.

Flexible Detection

Schematic cross-section of Gemini optical column with detectors.

Flexible Detection for Clear Images

  • Characterize all of your samples with the latest detection technology.
  • Get topographical, high resolution information with the novel ETSE and the Inlens detector for high vacuum mode.
  • Obtain crisp images in variable pressure mode with the VPSE or the C2D detector.
  • Produce high resolution transmission images with the aSTEM detector.
  • Investigate composition with the HDBSD or the YAG detector.


Available for ZEISS Sigma 300

Integrated EDS Solution

High Definition Imaging Meets Low Energy Analytics

Take advantage of Sigma Element, an integrated EDS solution with high usability and low-kV sensitivity. Improve usability by using only one PC to control both your EDS and ZEISS SEM. At the same time, parallel control is possible by having dedicated user interfaces for microscope and EDS control.

  • Profit from integration and combine high definition imaging with fast analysis for best results
  • Customize your software for different user needs
  • Enhance sensitivity with the unique Silicon Nitride window for low energy detection

Raman Imaging and Scanning Electron Microscopy

Reap the Benefits of Fully Integrated RISE

Get a chemical fingerprint from your sample: Extend your ZEISS Sigma 300 with confocal Raman imaging capability. Recognize molecular and crystallographic information. Perform 3D analysis and correlate SEM imaging, with Raman mapping and EDS data if appropriate. Fully integrated RISE lets you take advantage of both best-in-class SEM and Raman systems.



SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC.

ZEISS SmartSEM Touch - Get more Hands on Deck

SmartSEM Touch, an add-on to the established operation system, is a simplified user-interface for multi-user environments. It comes with easy operation for both experienced and novice users. Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. Sigma 300 and Sigma 300 VP take both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-microscopists.

Atlas 5

ZEISS Atlas 5 – Master Your Multi-scale Challenge

Atlas 5 makes your life easier: create comprehensive multi-scale, multi-modal images with a sample-centric correlative environment. Atlas 5 is the powerful yet intuitive hardware and software package that extends the capacity of your scanning electron microscope.

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Visualization and Analysis Software

Visualization and Analysis Software

ZEISS recommends Dragonfly Pro from Object Research Systems (ORS)

An advanced analysis and visualization software solution for your 3D data acquired by a variety of technologies including X-ray, FIB-SEM, SEM and helium ion microscopy.
Formerly Visual SI Advanced, Dragonfly Pro delivers high-definition visualization techniques and industry-leading graphics. Dragonfly Pro supports customization through easy to use Python scripting. Users now have total control of their 3D data post-processing environment and workflows.




ZEISS Sigma Family

Your Field Emission SEMs for High Quality Imaging and Advanced Analytical Microscopy

Pages: 32
Filesize: 13,987 kB

ZEISS Sigma 300 with RISE

Extend your ZEISS Sigma 300 with Fully Integrated Raman Imaging and Scanning Electron Microscopy (RISE)

Pages: 2
Filesize: 2,075 kB

ZEISS Sigma 300 with WITec Confocal Raman Imaging

Characterizing Structural and Electronic Properties of 2D Materials Using RISE Correlative Microscopy

Pages: 10
Filesize: 6,582 kB

ZEISS Sigma Family - Flyer

Your FE-SEMs for High Quality Imaging & Advanced Analytical Microscopy

Pages: 2
Filesize: 2,146 kB

Cathodoluminescence of Geological Samples:

Fluorite Veins

Pages: 5
Filesize: 5,477 kB