FE-SEM Upgrades

For an Increased Life Time and Extended Functionality

Detectors & Analytics

Analyze your sample through a wide range of different detectors. Different detectors allow you to receive various types of information about the surface, composition and other details which will help you to improve and ease your processes

Find the most suitable detectors for your needs:
 
  • Get a recommendation witch detector suits your application
  • Easy application guide
  • Detector specification information
  • Learn more about available functionallity
  • Interactive tool to learn more about ZEISS detectors

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aSTEM Detector

Get Maximum Information Thanks to Optimized Annular Design

Add transmitted electron imaging capability to your FE-SEM or Crossbeam system. Get additional information out of your ultrathin biological or solid-state specimens without need to use a dedicated Transmission Electron Microscope and enjoy flexibility and versatility.

Benefits

  • Improved image resolution
  • Ease of use
  • Higher productivity and versatility
Download

AsB Detector

Improve Low-kV Performance and Increase Productivity

Increase productivity and improve image quality of your FE-SEM by retrofitting the new angle selective Backscatter (AsB) Detector. Benefit from high speed and increased sensitivity due to improved detector and electronics design.

2kv_60um_30kx5_mk2 2k_30k_hc_60_asb_high12_mk4
without new AsB detector
with new AsB detector

Benefits

  • Improve low-kV performance
  • Enhanced imaging contrast
  • Steady temperature level
Download

aBSD Detector

Deliver a Great Variety of Contrast Information

The aBSD detector is used to detect backscattered electrons that have been scattered under very low angles. It provides a great variety of contrast information through the detector’s six input channels.

Benefits

  • Variable imaging
  • Enhanced signal collection
  • Quiet application
Download

EsB Detector

Make Sub-Surface Information and Nano-Scale Composition Visible

The Energy selective Backscattered (EsB) Detector is suitable for clear compositional contrast. It is an annular shaped incolumn detector that is located above the In-lens detector. The ability to detect BSE makes sub-surface information and nano-scale composition visible.

Benefits

  • More detailed material information
  • Reduced topography effects
  • Energy selective material contrast
Download

BSD Detector

Enable Real-time 3D Imaging and Surface Metrology

The BSD4 detector is used to detect backscattered electrons that have been scattered under very low angles. The COMPO-Mode is suitable to produce high quality material contrast, meaning heavy materials are displayed brighter than lightweight materials.

Benefits

  • Improve low-kV performance
  • Enhanced imaging contrast
  • Steady temperature level
Download

RISE for Sigma

Extend Your ZEISS Sigma with Fully Integrated Raman Imaging and Scanning Electron Microscopy (RISE)

RISE (Raman Imaging and Scanning Electron Microscope) offers you a chemical and structural fingerprint of your sample: Recognize molecular and crystallographic information and perform 3D analysis of the sample.

Benefits

  • Ease of use
  • Excellent quality results
  • Long working distance objective
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YAG BSD

Great Topographical & Compositional Imaging in All Vacuum Modes

The ZEISS YAG (Yttrium Aluminum Garnet) single crystal scintillator BSD detector enables a higher efficiency of light conductance, which is ideal for low signal imaging. The material which is free of radiation damage turns the YAG BSD into a detector, suitable for all beam energy ranges.

Benefits

  • Higher signal output
  • Damage prevention
  • Improved versatility
Download

ES Amplifier for BSD Detectors

Experience Next Level Imaging and Greatly Enhanced Image Quality

The BSD-Detector is used to detect backscattered electrons, that have been scattered under very low angles. The new amplifier provides higher detector efficiencies and delivers a variety of contrast information, much higher gain and a lower noise level.

Without ES Amplifier
With ES Amplifier

Benefits

  • Enhanced signal collection
  • Quiet application
  • Variable imaging
Download

ETSE for EVO & Sigma

Convincing Topographical SE Imaging

The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.

Benefits

  • Charging effect reduction
  • Enhanced topographical imaging
  • Superb surface detail
Download

VPSE G4

Improved Signal Collection for Faster Scan Speeds

The fourth generation Variable Pressure SE detector (VPSE G4) convinces with its improved collection signal and thereby a faster response time. Higher scan speeds enable you an increasement of productivity. VPSE G4 provides 20% more contrast up to 400 Pa pressure (at 20 keV).

Benefits

  • Topographical imaging
  • Increased scan speeds
  • Enhanced low kV imaging
Download

Nanostructuring & Patterning

Create structures in nanometer range by either removing or applying surface material and using different systems (e.g. Atomic Force Microscope), or benefit from multi-modal images and comprehensive multiscale with the various options of ZEISS Atlas 5

Atomic Force Microscope

Upgrade to 3D Resolution at Atomic Level

The Atomic Force Microscope adds calibrated, atomic-level, 3D resolution and high resolution measurements to the existing SEM functionalities.

Benefits

  • Learn about the mechanical, electrical, chemical and magnetic properties of your sample’s surface
  • Increased productivity and versatility as well as convenient handling
Download

Atlas 5

Master Your Multi-scale Challenge

ZEISS Atlas 5 makes your life easier: create comprehensive multiscale, multi-modal images with a sample-centric correlative environment.

Benefits

  • Correlate images in multiple dimensions from multiple sources
  • Fast and easy image acquisition
Download

Software & Workstation

Explore our latest software versions and extended functionality through license options as well as the current recommended high performance PC-Hardware to optimize your systems performance

SEM Workstation

Efficient Workflows, Intuitive Navigation and Faster File Search

The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.

Benefits

  • Latest SmartSEM version
  • Intuitive navigation
  • Windows 10
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SmartSEM

Operate Your Scanning Electron Microscope More Efficiently

SmartSEM is an operating system for electron microscopes that provides access to advanced microscope settings, designed to solve even the most challenging tasks.

Benefits

  • Enhanced imaging conditions
  • Additional software modules
  • More information of your images
  • Intuitive navigation
Download
Your guide to SmartSEM upgrades:
 
  • Interactive tool to learn more about SmartSEM
  • Easy software upgrade guide
  • Workstation compatibility information
  • Learn more about available additional software functionallity
  • SmartSEM Touch introduction
  • Get information about hotfixes

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Software Module Catalog

Extend the Functionality and Performance of Your Microscope

Add new and improve existing functionality through our broad range of licenses which will help you to improve your processes, ease the use of your system and have tools to receive more information.

Benefits

  • Improve your processes by new functionality
  • More comfortable usage
Download

SmartSEM Touch

Explore Your Object of Interest with a Simple Swipe of Your Finger

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools. 

Benefits

  • Sample type select
  • Detector overlays
  • Annotate & measure
Download

Image Processing Package

Display Images effortless

This package combines complmentary systems and licenses in one package. Consisting of Automated Imaging, SmartStitch, SmartBrowse and SmartTiff it allows the storage and management of probe sample records and modeling as well as designing of photomontages from overlapping graphics.

Benefits

  • Ease of use
  • Variety of selection options
  • Extended microscope efficency
Download

Vacuum & Ease of Use

Increase your convenience and facilitate your work routine e.g. reduced loading time and increased sample throughput through the Airlock or a significantly reduced noise level through the Vac Quiet Mode. Decontaminate your specimen and chamber with the Plasma Cleaner or improve image quality through the compensation of charging effect with the Flood Gun or the Charge Compensation

Airlock

Reduce Loading Time – Increase Sample Throughput

The airlock allows efficient loading of samples without breaking the existing vacuum and thus reducing the risk of contamination of the sample chamber. By using this method sample exchange time is also significantly reduced.

Benefits

  • Significantly increased throughput
  • Loading of large samples
  • Ergonomic and convenient handling
Download

Charge Compensation

Benefit from Less Charging Effects and an In-situ Cleaning Option

The Charge Compensation system offers localized discharging of non-conductive specimens by ionization of nitrogen. High resolution combined with an additional expansion of analytical capabilities are, with the integration of a Charge Compensation system, not restricted to conductive samples only but can also be executed for all kinds of non-conductive samples.

Benefits

  • Capture non-conductive specimens
  • Improve image quality
  • Increased productivity and variety
Download

Plasma Cleaner

Clean Your Chamber Quickly and Effectively

ZEISS offers you a fast and cost-efficient solution for specimen and chamber decontamination. A Plasma Cleaner is used to generate reactive gas-phase radicals in a plasma. The radicals migrate into the instrument chamber and chemically react with the unwanted hydrocarbons.

Benefits

  • Improved image quality
  • Fast specimen decontamination
  • Safe decontamination
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Focal CC

Define Image Quality by Eliminating Charging Effects

The ZEISS Focal CC (Focal Charge Compensation) is an improved gas injection system to increase image quality by eliminating charging effects. Former specimen charging, particularly in samples containing large regions of bare resin resulted in a significant degradation in image quality and distortion.

Benefits

  • High resolution imaging
  • Damage prevention
  • Automatic needle retraction
Download

Other Accessories

Upgrade your microscope with additional accessories such as sample holders, the latest version of our dual joystick controller and control panel or an Uninterruptible Power Supply (UPS) which ensures the safety of your system in case of a power failure

Uninterruptible Power Supply

Secure Your Microscope in Case of a Power Failure and Prevent Data Loss

An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.

Benefits

  • Bridge brief power failures
  • Safety for your microscope
Download

SEM Dual Joystick and Control Panel

Control Your SEM More Easily

With the Dual Joystick Controller and the Control Panel installed, operating becomes much more comfortable. The Dual Joystick Controller can be used for stage control and specimen navigation and the Control Panel gives you easy access to the most frequently used functions of the SEM.

Benefits

  • Many compensation possibilities
  • Various configuration options
  • Convenient handling
Download