1968
ZEISS produced the first lens for a circuit board printer (the predecessor to today’s wafer steppers and scanners) for Telefunken. It mapped structures of 15 micrometers.
1977
The S-Planar® 10/0.28 lens with a resolution of 1 micrometer is used in the first wafer stepper worldwide made by the American company David Mann (later GCA). In the following years, this development led to the first boom for the semiconductor manufacturing technology at ZEISS.