
AIMSTM AutoAnalysis (AAA) is a software solution for fast, fully automated analysis of AIMS™ aerial images. It runs independently from tool software on a high performance computational engine called FAVOR®, allowing the AIMS™ tools to be dedicated for measurements only while the analysis runs in parallel.
AIMSTM AutoAnalysis optimizes processes as it improves productivity, saves operator time and standardizes results.
Up to 40% back end of line process time per mask can be saved, therewith the software contributes to overall process flow improvement. Operators have more spare time and can focus on more critical work. Variations due to human error are eliminated through automation plus a maximum deviation is always captured.
Key Benefits
Direct communication with AIMS™ tool
- Current workflow remains the same
- Data transfer and analysis is automatically initiated
- Analysis runs in parallel to measurement
Customizable analysis recipes and strategies
- Large variation of CD, placement, CoG, etc. strategies supported
- Combination of strategies supports complex features
- Every slice for every strategy is measured
Customizable report templates
- Report templates are fully customizable to show only relevant data
- Multiple reports can be created for different reporting needs
- Direct export into pdf, csv and xml format is supported
Manual interaction possible
- Easy access to each step of the analysis for each defect
- Manual changes can be made and resaved into the existing report