AIMS™ AutoAnalysis runs independently from tool software, allowing the AIMS™ tools to be dedicated for measurements only while the analysis runs in parallel. It optimizes processes as it improves productivity, saves operator time and standardizes results.

AIMS™ AutoAnalysis EUV (AAAEUV) extends the automated defect verification to the segment of high-end EUV mask manufacturing. Parallel processing allows for high throughput and sophisticated analysis algorithms for evaluation of even the smallest EUV structures. Extended standardization, realized by a recipe and template based approach, also enables to run DUV processes identically for EUV mask making. Significant time savings are achieved by analyzing data in parallel to running measurements. By taking out the human factor reliability is improved and operator to operator variations are eliminated.

The Advanced Repair Center ARC is capable of connecting tools and software products in a smart way. It is a back end of line manufacturing enterprise solution that targets productivity, costs saving and shorter turnaround time through the use of intelligent automation. Built on the connectivity provided it facilitates data management and process flow optimization for the entire defect handling process. That significantly reduces the required amount manual interactions and makes processes less prone to human errors resulting in increased reliability.