AIMS 32-193i SE

Enhanced flexibility for defect and repair verification of 193 nm mature products.

  • Highlights

    General

    ZEISS AIMS 32-193 SE is dedicated to 193 nm mature products which require a considerable flexibility for defect verification but facing the challenge of cost effectiveness.

    Features

    AIMS™ 32-193i SE sits on a proven and robust measurement platform. To provide a high illumination flexibility the system is equipped with a two slider solution. The combination of illumination shapes on each slider offers a large variety of conventional illumination schemes. On top of that the system provides the FreeForm Illumination (FFI) capability realizing more complex illumination shapes to support SMO requirements.

    The specification reflects the requirements of 193 nm mature products in terms of CD repeatability and throughput but ensuring a cost effective solution.The overall defect verification productivity can be further improved by utilizing the AIMS™ AutoAnalysis (AAA) option which provides completely automated defect analysis in parallel to the measurement.

  • Software

    AIMS™ AutoAnalysis

    Ideal software for automated defect analysis

    The overall defect verification productivity can be further improved by utilizingthe ZEISS AIMS AutoAnalysis (AAA) option which provides completely automated defect analysis in parallel to the measurement.

    AIMS™ AutoAnalysis (AAA) is a software solution running on all AIMS™ systems. AIMS™ AutoAnalysis provides fast, accurate and fully automated analysis of aerial images to receive shorter turn-around times, higher reliability and an overall boost in productivity.