Photomasks featuring zero printable defects with ZEISS MeRiT systems

SEM AutoAnalysis extends the AIMS™ AutoAnalysis solution available for the back end of line of mask manufacturing. With its production proof concept it brings automation to the evaluation of SEM based images resulting in increased reliability, less variability and finally a reduction of turnaround time. Moreover, mask makers can harness more information from already existing SEM data. This adds more credibility to the defect-qualifying step.

The Advanced Repair Center is a completely new category of products capable of connecting tools and software products in a smart way. It is a back end of line manufacturing enterprise solution that targets productivity, costs saving and shorter turnaround time through the use of intelligent automation. Built on the connectivity provided it facilitates data management and process flow optimization for the entire defect handling process. That significantly reduces the required amount manual interactions and makes processes less prone to human errors resulting in increased reliability.