Software Applications

  • AIMS™ Auto Analysis (AAA)

    AIMS™ AutoAnalysis (AAA) is a software solution for fast, fully automated analysis of AIMS™ aerial images. It runs independently from tool software on a high performance computational engine called FAVOR®, allowing the AIMS™ tools to be dedicated for measurements only while the analysis runs in parallel.


    AutoAnalysis optimizes your process, as ...

    ... it improves productivity

    • Saves up to 40% back end of line process time per mask
    • Contributes to overall process flow improvement

    ... it saves operator time

    • Operators can focus on more critical work

    ... it standardizes results

    • Variations due to human error are eliminated
    • Maximum deviation is always captured

    AAA Key Features

    Direct communication with AIMS™ tool

    • Current workflow remains the same
    • Data transfer and analysis is automatically initiated
    • Analysis runs in parallel to measurement

    Customizable analysis recipes and strategies

    • Large variation of CD, placement, CoG, etc. strategies supported
    • Combination of strategies supports complex features
    • Every slice for every strategy is measured

    Customizable report templates

    • Report templates are fully customizable to show only relevant data
    • Multiple reports can be created for different reporting needs
    • Direct export into pdf, csv and xml format is supported

    Manual interaction possible

    • Easy access to each step of the analysis for each defect
    • Manual changes can be made and resaved into the existing report
    • FAVOR® connects different AIMS™ systems and offline workstations
      FAVOR® connects different AIMS™ systems and offline workstations
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