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Control your process. ZEISS iTrap
innovationMADE BY ZEISS

ZEISS Process Gas Analyzer

Real time process control for various applications

  • Overview

    See where you have been blind before

    iTrapĀ® is a compact, highly sensitive ion trap Fourier Transform mass spectrometer. It is an ideal tool for process analysis and inline process control. It can be used in R&D and production environments. iTrap supports you reliably in detecting the smallest traces of reaction byproducts or contamination,it helps you to investigate effectiveness of cleans and analyse chamber health.

    A mass psectrum is measured in almost real time. With concentrations down to ppb levels or below, you can trace very small amounts of molecules in your process chamber.iTrap is a powerful tool in the hands of researcher or process development engineer, but it can also be used as an intelligent sensor integrated and controlled by 

  • Benefits

    ZEISS iTrap convinces through: 

    Speed | Real time measurements possible, full spectrum in < 1 sec

    Sensitivity | ppb concentrations in < 1 sec at full spectrum

    Compactness | High quality in line measurements possible, can be integrated in (or attached to) a process chamber

    Robustness against corrosives | No fragile Detectors, no degradation, Inert surfaces

    Ease of Use | Watch the ZEISS iTrap Videos to better understand the technology behind and the ease of process integration of ZEISS iTrap.

  • Applications
  • Brochure

    ZEISS iTrap

    Real time process control for semiconductor processes

    Page(s): 13
    File size: 2,537 kB

  • Video

    How ZEISS iTrap works

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    How to install ZEISS iTrap

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    Learn more about the ZEISS iTrap technology

    Watch the ZEISS iTrap videos to learn more about the
    working principle and the integration into your production workflow.

    Click full screen icon to catch all details.

  • Contact

    If you are interested in this technology, please do not hesitate to contact:

    Martin Antoni

    +49 160 90 81 32 47

    martin .antoni @zeiss .com