Starlith® EUV Optics (Product is not sold in Germany)


In April 2012 an entire ZEISS Starlith EUV Optics system was delivered for the first time to the strategic partner of the Semiconductor Manufacturing Technology business group at ZEISS, the Dutch company ASML, and integrated in a wafer scanner. As part of the wafer scanner used for structuring microchips, the Starlith EUV Optics system by ZEISS achieved resolutions of less than 30 nanometers.

ZEISS is the world’s leading manufacturer of lithography optics with EUV technology.

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