Mask Solutions Support Your long-term operations sustained with excellent, comprehensive and flexible support packages.

ZEISS Predict Program

A download of the ZEISS Predict Program for Support & Service as PDF file is soon available again.

Predict | basic

With ZEISS Predict | basic we ensure timely access to spares and support priority along with high tool performance and availability at the lowest cost. Predict | basic covers all required wearing parts and labor hours to perform our proactive annual maintenance program on an annually basis.

Predict | advanced

Choosing ZEISS Predict | advanced enables you to reduce the risk of service costs by covering proactive exchange and extend warranty of components and parts with an guaranteed MTBF and high uptime of ≤ 3 years. Predict | advanced includes our basic package plus it covers all service costs to perform proactive parts exchange of defined parts identified as having lifetimes of up to 3 years (annually plus multi annually PM parts exchange).

Predict | proficient

With ZEISS Predict | proficient we provide a product for our customers owning tools that have been in operation for five years or more. The Predict | proficient concept is a step beyond Predict | basic and can include all labor in addition to so-called “risk” parts that have been identified during any product generation’s time in the field. In this way you benefit from the best balance of tool availability and affordabillity for more mature systems.

Predict | premium

If you are looking for a fixed cost of ownership and no risk solution along with high uptime, we are pleased to offer you ZEISS Predict | premium. Take complete control of the cost by including labor costs, travel costs and costs for spare parts in your Predict | premium service agreement. We make your service outlay entirely predictable. Your budget is not affected by unforeseen costs: maximum performance and availability are factored into a single superior protection plan. This contract is available for all our systems.

Predict | premium plus

As a holder of a Predict | premium plus you will always benefit from priority treatment. We are providing fastest possible on site engineering response and spare parts delivery. This includes engineers and consignment stock dedicated at your facility and is offered in addition to the ZEISS Predict | premium package.

At a glance

Support whenever needed

The ZEISS Predict Service Program levers the extensive knowledge that we have gained over many years from our worldwide installed base to help customers improve productivity and reduce costs. Excellent support and cost effective tool performances maximise the return on investment that you rightly expect after the purchase of capital equipment.

Additional Support Offerings

In regards to you requirements you can add further service offerings. If you would like to find out more, please contact your local Service Representative, who will be happy to explain the complete ZEISS Predict Program in more detail.

Upgrades Business

Some of our photomask systems are developed to have additional capabilities, often with an upgrade path to maximise their application space and usage in the market. Such options or upgrades can address both technical capability and productivity of our equipment.


Due to the dynamic marketplace and longevity of ZEISS equipment, you might find yourself in the situation were you require the relocation of your systems. Whether this be within a single cleanroom, or right around the globe – you can be confident that ZEISS has the infrastructure to make this happen. Right from a simple installation, up to refurbishment with a commitment to the original specification.


For those customers who demand additional peace of mind ZEISS is able to tailor spares packages on all product lines that can be made available and shipped to the field. Customers who enter into the Predict program can benefit from preferential pricing for such packages. Together with our three key spare hubs in Europe, Asia and the US the program operates fast and smooth.


As an integral part of Predict we offer consulting services that can act not only on the tool, but also at the fab level. Using the extensive industry knowledge of our specialists we have the ability to uncover solutions that are not always visible to single organisations. Such can include specific maintenance activities or process optimization for tools.


Depending upon your requirements and location, from time to time it will be sensible to invest in a support resource that is dedicated to a particular facility. Such an additional expert can work side by side with your engineers building a longterm and effective relationship that has been shown to be successful in all regions.


Refurbishing is ideal for equipment in the field which is used for many years and across many technologies. Combining high skill levels with state of the art testing and support can ensure that every tool conforms to original specifications, meets all relevant safety standards and includes the latest licenced system software.

Find your nearest Sales and Service Center

The ZEISS Sales and Service Center together with our three key spare hubs in Europe (Germany), Asia (Taiwan) and USA (San Francisco), ZEISS Predict provides the highest assurance for seamless manufacturing.

Tokyo | +81 3 3355 0256 | in fo @zeiss .co .jp
Jena | +49 3641 64 2563 | info .sms @zeiss .com
Bundang-gu Seongnam-si | +82 31 711 5961 | in fo @zeiss .co .kr
Hsinchu City | +88 63 577 6316 | info .sms @zeiss .com
Thornwood, NY | +1 855 253 8126 | info .sms @zeiss .com

Customer Care beyond warranty Tailored support for your individual needs.


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