Multi channel spectrometer


Multi-channel Spectrometer

  • Introduction

    The MCS family of spectrometers provides robust feature with high repeatability and exceptional resolution. The instruments are suitable for numerous applications and perform efficiently in both, lab and in process analyses. They can be directly integrated into at-line, on-line and in-line inspection processes. They gather fast and precise results in fluorescence, and layer thickness measurements as well as in plasma spectroscopy. The CCD or PDA sensors provide the highest sensitivity throughout the UV to NIR range and are especially sensitive in detecting low light levels.


    Components of the MCS family

    • Fiber cross-section converter and/or slit as optical input
    • Imaging, aberration-corrected grating
    • Photo diode array or back-thinned CCD as opto-electronic output are attached to a central body
    • Interfaces, processing software and support


  • Highlights


    • Insensitive to external influences
    • Precise measurements
    • Extremely low temperature drift
    • Low stray light
    • Compact and rugged design


  • Design
    • Silicon diode array S3904-512Q or 1024Q detector from Hamamatsu (PDA)
    • Diode array is directly coated with dielectric cut-off filters
    • Back-thinned CCDs S7301-0906Q or 1006Q from Hamamatsu (CCD) for excellent direct sensitivity to UV light
    • Integrated Peltier element to reduce dark current
    • Ceramic housing
    • Aberration corrected grating, cross-section converter/mechanical slit and detector are directly attached to the housing
    • Holographically blazed, flat field gratings
    • Holographic aberration corrected gratings achieve plane spectra with a length of about 25 mm
    • Fibers with numerical apertures up to 0.22 for optical input
    • Fiber-bundle cross-section converter to convert a circular light beam into a slot-shaped light beam
    • Fan cooled heat sink
  • Specification
    Optical entrance Cross section converter Cross section converter
    Input round diameter = 0.5 mm, NA = 0.22 SMA connector
    diameter = 0.5 mm, NA = 0.22 SMA connector
    Output linear 70 µm x 2400 µm 70 µm x 1400 µm
    Grating Flat-field, blazed for approx.
        250 nm UV-version
        450 nm VIS-version
        750 nm NIR version
    Flat-field, blazed for approx.
        250 nm UV-version
    Spectral range 190-1,015 nm (other options available)
    190-980 nm (other options available)
    Wavelength accuracy 0.3 nm 0.5 nm
    Temperature - induced drift < 0.005 nm/K < 0.01 nm/K
    Mean spectral pixel pitch Δ λ pixel ≈ 0.8 nm Δ λ pixel ≈ 0.8 nm
    Resolution ΔλFWHM ≈3 nm (UV-version)
      ΔλFWHM ≈3 - 4 nm (UV-NIR version)
    ΔλFWHM ≈3 nm (UV-version)
      ΔλFWHM ≈3 - 4 nm (UV-NIR version)
    Straylight ≤ 0.1% measured at  340 nm with Deuterium lamp (transmission of NaNO2 solution, 50g/l, 1cm) ≤ 0.1% measured at  340 nm with Deuterium lamp (transmission of NaNO2 solution, 50g/l, 1cm)
    Dimensions 140 x 105 x 75 mm³
    177 x 178 x 75 mm³
  • Downloads

    ZEISS MCS Dimensions

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    file size: 2998 kB


    ZEISS Spectrometer Modules

    Compendium of products, electronic components and software solutions

    pages: 27
    file size: 2110 kB