Multi channel spectrometer


Flexible multi-channel Spectrometer

  • Introduction

    The MCS FLEX system is built for mobile high performance measurement;. it delivers precise results in the lab as well s during process monitoring. The flexible design makes it suitable for many applications, and it can be directly integrated into at-line, on-line and in-line inspection processes. Depending on the specific application, different designs of the central body are available. Cross-section converters and detectors can easily be customized on request.


    Components of the MCS FLEX family

    • Fiber cross-section converter and/or slit as optical input
    • Imaging, aberration-corrected grating
    • Photo diode array or back-thinned CCD as opto-electronic output are attached to a central body
    • Interfaces, processing software and support


  • Highlights


    • Compact design
    • Considerably low weight
    • Insensitivity to external influences
    • Flexible module placement
    • Low temperature drift
    • Low stray light
  • Design
    • Silicon diode array S3904-1024Q from Hamamatsu is applied (MCS FLEX PDA)
    • Diode array is directly coated with dielectric cut-off filters to suppress higher orders
    • Back-thinned CCD S7301-1006Q from Hamamatsu is used to offer excellent direct sensitivity to UV light (MCS FLEX CCD)
    • Integrated Peltier element to reduce dark current
    • Central body made of special aluminum alloy
    • Aberration-corrected grating, the cross section converter or mechanical slit and the detector directly attached to the housing for robustness and outstanding stability
    • Holographically blazed, flat field gratings
    • Holographic aberration corrected gratings achieve plane spectra with a length of about 25 mm
    • Diffraction efficiency of the gratings is optimized by reactive ion beam etching (RIBE)
    • Fibers with numerical apertures up to 0.22 can be used as optical input
    • Fiber-bundle cross-section converter converts a circular light beam into a slot-shaped light beam
    • Total size of the slit is adapted to the pixel size of the sensor array and to the imaging and dispersing properties of the flat field grating
    • Fan cooled heat sink
  • Video
  • Specification
    Optical entrance Cross section converter Cross section converter
    Input round diameter = 0.5 mm, NA = 0.22, (has to be filled for full specification) mounted in SMA-coupling diameter = 0.5 mm, NA = 0.22, (has to be filled for full specification) mounted in SMA-coupling
    Grating Flat-field correction 248 l / mm (center), blazed for approx. 250 nm 750 nm NIR version Flat-field correction 248 l / mm (center), blazed for approx. 250 nm
    Diode array Hamamatsu S 3904-1024Q; 1,024 pixels Hamamatsu S 7031-1006; 1,044 x 64 pixels
    Spectral range 190-1,015 nm (other options available) 190-980 nm (other options available)
    Wavelength accuracy 0.3 nm 0.5 nm
    Temperature - induced drift < 0.009 nm/K < 0.009 nm/K
    Mean spectral pixel pitch Δ λ pixel ≈ 0.8 nm Δ λ pixel ≈ 0.8 nm
    Resolution Δ λ FWHM ≈ 3-4 nm Δ λ FWHM ≈ 3-4 nm 
    Straylight ≤ 0.1 % measured at 340 nm with deuterium lamp (transmission of NaNO2 solution, 50g/l, 1 cm) ≤ 0.1 % measured at 340 nm with Deuterium lamp (transmission of NaNO2 solution, 50g/l, 1 cm)
    Dimensions 160.3 x 62 x 122.2 mm³ 198 x 68 x 122 mm³ (long Cross Section Converter)
      160.3 x 68 x 122 mm³ (short Cross Section Converter)              
  • Downloads


    Multi Channel Spectrometer module

    pages: 3
    file size: 619 kB


    ZEISS MCS FLEX Dimensions

    pages: 1
    file size: 1252 kB


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