Plane Grating Spectrometer Module
The plane grating spectrometers are designed for application in the NIR range for specific measuring tasks. These compact and robust modules measure even thick layers with stable wavelength high resolution and the highest precision, even under extreme process conditions. InGaAs (indium-gallium-arsenide) is used as a detector material. The special combination of aspheric collimator and a focusing lens maintain a good, flat field correction of the spectral imaging.
Components of the PGS family
- Blazed plane gratings
- Aspheric lenses
- Mono-fiber with slit as optical input
- Cooled InGaAs photodiode array as opto-electronic output
- Interfaces, processing software and support