ZEISS EVO – Automate and Correlate The Smart Alternative to TTSEMs for Materials Analysis

The latest generation ZEISS EVO brings all the benefits of a compact SEM, but with functionality, analytical options, data quality and laboratory connectivity not possible in a tabletop instrument.

  • Easy to use for non-expert users
  • Short time to result and high throughput
  • Small footprint in the laboratory
  • Lower costs compared to conventional SEMs
  • Future assurance with Service, Support, and Upgradability


  1. Do I need to be an electron optics expert to jump into SEM?
  2. Why is region of interest targeting and contextual data reporting so critical in SEM?
  3. Tabletop/desktop form factor provides utility for portable and remote applications, so why go for a floor model system instead?
  4. Tabletop/desktop systems provide an attractive price point for entry into the EM application space, does this mean floor model systems are out of reach?

ZEISS EVO with ZEN core for the connected laboratory

Workflow Solutions for ZEISS EVO

EVO offers workflow solutions for guided acquisition, automated analysis of routine sample types, machine learning powered segmentation for complex microstructures, and multimodal correlation across instruments and labs.

  • How-to Video
    ZEN Intellesis
  • How-to Video
    ZEN Core
  • How-to video
    ZEN Connect
  • A How-to Video
    SmartSEM Touch

Connect to Productivity. Connect the digital and real world

ZEISS AR Metrology App

The "ZEISS AR Metrology" app links the digital world by using augmented reality. The app lets you expierence ZEISS measuring equipment interactively.

All you need is a smartphone or tablet

Only 3 simple steps to get the AR experience

1. Download and install the ZEISS AR Metrology App

2. Open it and choose your machine

3. Place the machine on a surface and experience the machine


The materials industries’ stable, intuitive, uncompromising SEM for:

  • Structural characterization
  • Spectroscopy of materials, alloys and impurities
  • Phase and grain analysis and crystallography
  • Surface topography, contamination and corrosion
  • Inclusion, particle, weld and failure analysis
  • Easy and seamless correlative microscopy
  • Imaging and analysis of heavy and bulky samples
  • Optional LaB6 emitter and high definition backscatter detection for superior imaging
  • Class leading geometry for highest throughput and efficiency of EDS analysis

Easy to use even for non-microscopists

SmartSEM Touch UI puts interactive workflow control directly at your fingertips. It is quick and easy to learn, dramatically reducing training effort and costs. Within minutes, even new users will begin capturing stunning images. EVO also supports industrial operators who require automated workflows for repeatable inspection tasks, and multiskilled metals researchers using SEM as one of multiple tools.

Rapid high resolution insights with high productivity

EVO needs only about 1 minute to vent the vacuum chamber, so you can exchange samples and resume imaging within a very short time. Additionally, automation functions and incredible stability let you make the most of your valuable laboratory time, utilizing long unattended analysis runs. Its heavy-duty stage, analytical capability, and adaptability for an array of accessories, means it has the power to support your research or quality control.

EVO can also be used in small laboratories

The space requirement for EVO is only slightly greater than that of tabletop solutions. To determine the space actually required, you also must consider the size of the operator workstation, which on EVO can be adjusted individually, so that even smaller laboratories do not have to do without the power of a full-featured SEM. The neat plinth-based design gives superior stability and integration.

EVO provides a superior price-performance ratio

Would it surprise you to know that the EVO portfolio has options that are price competitive with tabletop SEM? EVO offers greater versatility, your needs are far less likely to outgrow its capability and your investment is futureproof. Huge upgrade possibilities enable you to tailor a SEM solution to meet your immediate – and future – requirements.

The EVO Family

Vacuum Chamber Size Options


Choose EVO 10—with optional backscatter detector and Element EDS system—to be your entry point to scanning electron microscopy, at a remarkably affordable price. Even this smallest of EVO vacuum chambers is well differentiated from tabletop SEMs. Your investment in EVO now assures that you are ready for applications that require more space and ports than you anticipate today.

EVO 15 demonstrates the flexibility concept of the EVO family and excels in analytical applications. Opt for the larger vacuum chamber of the EVO 15, and add variable pressure for imaging and analysis of non-conductive samples or parts, and you have a versatile, multi-purpose solution for central microscopy facilities or industrial quality assurance laboratories.

EVO 25 is the industrial workhorse solution with enough space to accommodate even the largest parts and assemblies. Expand EVO 25 capabilities further with an optional 80 mm Z travel stage that can handle weights up to 2 kg even with tilt. Additionally, the large chamber will accommodate multiple analytical detectors for the most demanding microanalysis applications.

Maximum specimen heights


145 mm

210 mm

Maximum specimen diameter

230 mm

250 mm

300 mm

Motorized stage travel XYZ

80 x 100 x 35 mm

125 x 125 x 50 mm

130 x 130 x 50(or 80) mm

High Vacuum (HV) mode
Best quality imaging and analysis on conductive samples

Variable Pressure (VP) mode
High quality imaging and analysis on uncoated, non-conductive samples

Extended Pressure (EP) mode
Environmental imaging of hydrated or contaminated samples in their natural state

Outstanding performance and quality features

The superior price–performance ratio of EVO becomes particularly clear when compared to the limited possibilities of a tabletop (TTSEM) system:

Tabletop Systems

Large chamber
Examine large samples or multiple samples to increase efficiency.


5-axis motorized stage
View samples from different angles – up to 90° tilt – without time-consuming rearrangement.


Better navigation
Identify regions of interest faster. Low magnification (5x) overview imaging make navigation easier.


Higher resolution
Examine your samples in detail down to the range of a few nanometers.


Additional detectors
Run advanced analysis with additional detectors to characterize your samples more comprehensively.


Lowest acceleration voltage of 200 V
Investigate non-conductive samples without the need for coating or other preparation methods.


High acceleration voltage of above 15KV and up to 30KV
Investigate your metallurgic samples at above 15KV to achieve best performance levels from your EDS detector.


High magnification imaging
Characterize the structural properties of your materials sample even further with magnifications up to 1,000,000x.


Extendable system
Expand your system to add new capabilities, like automated particle analysis, EBSD to study crystalline or polycrystalline materials.


Correlative microscopy
Integrate EVO into multimodal workflows with light or X-ray microscopes and benefit from more meaningful data.


Longevity of your EVO SEM
Get the most out of your investment from 'an instrument that can deliver well beyond 10 years of usage'


Experience the imaging and analytics capability of EVO

Materials Research Application Examples

Get in touch

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