Nanoscale 3D Imaging of Buried Features

Compositional mapping using EDS.
FIB-SEM data courtesy of ZEISS labs@location at Plymouth Electron Microscopy Centre (University of Plymouth), supported by the European Regional Development Fund.
Sample courtesy of TWI Ltd.

Fabricated with automatic sample preparation on ZEISS Crossbeam.

Reconstruction of different phases at transition.
ZEISS FIB-SEM imaging, courtesy of P. Burdet, EPFL, Switzerland

Prepared with a ZEISS FIB-SEM simultaneously acquiring 4 different signals.
Top left: Inlens SE; top right: SE2; bottom left: Inlens EsB; bottom right: Inlens SE mixed with SE2.
Sample courtesy D. Willer, MPA Stuttgart, DE

Resolution of 8 nm/voxel. The region of interest was located using X-ray microscopy in the ZEISS Xradia Versa and Ultra series, and then moved to ZEISS Atlas software to perform high resolution FIB-SEM tomography in this region to enhance multiscale analysis.
Sample courtesy of the University of Manchester UK; image courtesy of Philip Withers (University of Manchester UK)
 

ZEISS Crossbeam FIB ona polymer protective layer with two copper layers with different grain sizes.

Using ZEISS Crossbeam 540 with Atlas 5 NPVE Advanced. Field of view 40 μm.
Image courtesy David Unrau, Fibics Incorporated, Ottawa, Canada

Without FIB polishing. Microstructural details like grains, inclusions and pores are directly visible, showing the quality of the laser cut; processed in under 250s. Image courtesy Tim Schubert, Aalen University, DE