Webinar
News from ZEISS Crossbeam Family - Applications of LaserFIB and ToF-SIMS
29 April 2020
· 39 min watch

Author
Solutions Manager Materials Science
Dr. Fabián Pérez-Willard
Solutions Manager Materials Science
ZEISS Microscopy

Author
Sales and Applications Specialist
Dr. Antonio Casares
Sales and Applications Specialist
ZEISS Microscopy
Abstract
News from ZEISS Crossbeam Family – Applications of LaserFIB and ToF-SIMS
The LaserFIB combines an ultra-short pulsed laser, typically a femtosecond (fs) laser, and a FIB-SEM, all in one microscope. Massive material ablation by the laser allows to gain rapid access to structures buried deeply in e.g. packaged electronics or display devices. The targeted regions of interest can then be analyzed by FIB-SEM. Remarkably, sample damage or heat effects induced by the laser are minimal. Thus, the LaserFIB is attracting attention also in the field of materials engineering and characterization, e.g. for the fabrication of micromechanical testing devices with dimensions of up to millimeters or large cross sections for EBSD.
As a leading supplier of electron and ion optical systems ZEISS offers a state of the art Secondary Ion Mass Spectroscopy (SIMS) technology for compositional and Isotopic analysis. The webinar will give an overview of the high-end SIMS technology and its potential application space.
Key Learnings:
- Learn about two of the latest additions to ZEISS FIB-SEM portfolio: ZEISS Crossbeam laser and the ToF-SIMS add-on
- Learn how ZEISS Crossbeam laser is a unique solution for large-scale sample preparation and sub-sequent analysis in the FIB-SEM
- Gain an overview about the high-resolution SIMS technology from ZEISS and potential applications

