News from ZEISS Crossbeam Family - Applications of LaserFIB and ToF-SIMS

The LaserFIB combines an ultra-short pulsed laser, typically a femtosecond (fs) laser, and a FIB-SEM, all in one microscope. Massive material ablation by the laser allows to gain rapid access to structures buried deeply in e.g. packaged electronics or display devices. The targeted regions of interest can then be analyzed by FIB-SEM. Remarkably, sample damage or heat effects induced by the laser are minimal. Thus, the LaserFIB is attracting attention also in the field of materials engineering and characterization, e.g. for the fabrication of micromechanical testing devices with dimensions of up to millimeters or large cross sections for EBSD.

As a leading supplier of electron and ion optical systems ZEISS offers a state of the art Secondary Ion Mass Spectroscopy (SIMS) technology for compositional and Isotopic analysis. The webinar will give an overview of the high-end SIMS technology and its potential application space.