ZEISS AIMS® 1x-193i
More accurate, faster and user-friendly
AIMS® 1x-193i is a unique mask qualification system used in mask shops for defect review, printability analysis and repair verification for all types of high-end photomasks. It enables the user to qualify the optical performance of a mask under scanner equivalent illumination conditions.
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ZEISS Process Gas Analyzer
Real time process control for various applications
The compact, highly sensitive ion trap Fourier Transform mass spectrometer detects every trace contamination and process constituent in real time. It is an ideal tool for inline process control, contamination measurements, R&D and operations.
