Illumination-System High-NA-EUV-Lithographie

SMT Magazine

Sustainability all the way: From design to campus

22 April 2026 5 min read

Measuring sustainability precisely – to ensure long-term success

ZEISS is a foundation-owned company with a clear focus on the future – both from an economic perspective and in terms of social responsibility. Sustainability is a key success factor, and we are doing our part to contribute to it. Our goal: climate neutrality by 2045. However, we aim to systematically improve our impact across all ESG areas – environment, social, and governance – and are building an increasingly detailed, robust database to support this. We track emissions, consumption, and other key figures in such a way that progress becomes measurable and sustainability helps shape our business decisions. Just as with our products, we value precision and aim to continually push the boundaries of what is (supposedly) possible.

To the ZEISS Sustainability Report 2024/25

Innovative products: Embedding sustainability in design

Our products are the most significant drivers of sustainability at ZEISS SMT. That is why we assess their carbon footprint across their entire lifecycle. Sustainability experts provide guidance to our development teams. One example in the field of EUV lithography is the illumination system (Illu) of the Starlith® 4200. When we analyzed the previous design in detail, it quickly became clear that a significant portion of the carbon footprint was caused by the large mechanical frame structure, the Illu Frame. For the new generation, our team therefore focused precisely on this area, replacing certain manufacturing materials and closely coordinating new materials, design, and manufacturing – while maintaining the same high-quality standards. The result: Compared to the previous product generation, we were able to reduce the Illu Frame’s carbon footprint by about two-thirds and, in the end, even lower costs in the long term.

Sustainability is an integral part of the product development process from the very beginning, not just an afterthought added at the end.

Tobias Berndt Teamlead Sustainability at ZEISS SMT

SMO, short for the ZEISS Semiconductor Manufacturing Optics strategic business unit

Service and refurbishment: Every additional hour of operation matters

Sustainability depends not only on newly designed products, but also on how long existing systems remain reliably in operation. Approximately 95 percent of all lithography systems we have ever delivered – a significant majority of those being DUV lithography systems – are still in use, many for 15 to 25 years. This longevity is no coincidence: In our service operations, our goal is to repair defective products and thereby extend the service life of highly complex machines.

That's why our specialists carefully evaluate which components can be reused or refurbished. Components are designed to be more accessible to service teams, on-site repairs are becoming more common, and components in existing EUV systems are refurbished for a second life. Refurbishment, reuse, and serviceability – these are key criteria right from the product development stage. This allows us to reduce waste, conserve resources throughout the entire supply chain, and simultaneously lower costs for our customers. In the future, data monitoring, predictive maintenance, and AI will help us even more to identify problems early on and prevent downtime.

Saving energy: From cleanrooms to solar power systems

Energy is one of the key parameters for greater sustainability – especially in semiconductor manufacturing, with its energy-intensive cleanrooms. That’s why we’re rethinking established processes and focusing on areas where even small changes can have a big impact. In two EUV production halls, we have decommissioned unused exhaust air ducts so that no more cleanroom air is extracted than necessary. This results in significant savings in energy, CO₂, and thus costs. In the High-NA-EUV technology field, backup vacuum pumps for measurement systems are now only activated when they are truly needed, eliminating idle power consumption.

In a hall at our Oberkochen site, we have switched from fluorescent tubes to an LED system with Human Centric Lighting, which significantly reduces energy consumption while also supporting the sleep-wake cycle of employees working in shifts. Renewable energy is also playing an increasingly important role: A new solar power system on an office building in Oberkochen generates enough green electricity to power approximately seventy households for a year.

Social engagement: Responsibility beyond the campus

At ZEISS SMT, sustainability goes beyond the factory gates and CO₂ reduction. One example is the Social Engagement Program, a key component of our Corporate Social Responsibility (CSR). All projects in this program are based on ideas submitted by SMT employees, ranging from the “Gift of Joy” wish tree campaign to scholarships for international STEM students, as well as school projects like drone soccer or collaborations with social organizations. The focus is on promoting STEM education, research, digitalization, health, and the environment. Twice a year, ZEISS SMT organizes a trash cleanup campaign at various locations. The message: We all share the responsibility to conserve our natural resources and ensure the quality of life for future generations.

Biodiversity: Nature makes the workplace more attractive

Biodiversity benefits not only plants and animals, but also our employees: shaded break areas, blooming flowers, and the sound of birdsong reduce stress levels and promote mental well-being. Nature beats cement. At the Oberkochen campus site, we are therefore purposefully redesigning open spaces, facades, and roofs, for example, with dry riverbeds, mini-forests, nature-oriented planting concepts based on NABU recommendations, a green parking garage facade, and upgraded break areas. Raised beds – so-called “bee gardens” – provide insects with food and habitat. Through team events, we involve our employees in initiatives to promote biodiversity, such as at the Jena site, where SMT teams worked together with NABU to maintain meadows in the Rothenstein Nature Reserve.

For us, sustainability is more than just a statistic in a report. When we operate sustainably, we are more efficient and thus better positioned for future success – and we take responsibility for ourselves, our society, and our environment.