Products from ZEISS Semiconductor Manufacturing Technology

Our everyday life is becoming increasingly digital, smarter, more connected – and computing power is continually increasing. This is only possible with microchips. The product portfolio of ZEISS SMT covers various key processes in the production of microchips, including semiconductor manufacturing optics – such as lithography optics, photomask systems, and process control solutions. This way, we enable chip manufacturers worldwide and lay the foundation for ever smaller, more powerful, and energy-efficient microchips globally.The electronic applications equipped with these microchips enable global progress in various disciplines. Microchips are built into electronic products, found in almost every household appliance, such as dishwashers or coffee machines. Devices like smartphones, computers, or tablets cannot function without them. And technological innovations like automation, AI, or autonomous driving would be unimaginable without them.Thus, ZEISS SMT shapes technological progress and makes things possible that we do not yet know today.


More information about ZEISS SMT

ZEISS Semiconductor Manufacturing Technology (SMT) consists of three strategic business units (SBUs). Together, they form the product portfolio of ZEISS SMT and deliver key technologies for microchip manufacturing:

SMO – Semiconductor Manufacturing Optics
SMS – Semiconductor Mask Solutions (photomask solutions for semiconductor manufacturing)
PCS – Process Control Solutions (process control solutions for semiconductor structures)

Within ZEISS Semiconductor Manufacturing Optics (SMO), we develop and manufacture highly precise optical systems and technologies for the semiconductor industry. The portfolio includes lithography optics (for DUV, EUV, and High-NA-EUV lithography) and illumination systems, laser optics, optical modules for wafer and mask inspection, as well as synchrotron optics and X-ray gratings for research applications. These solutions enable chip manufacturers to expose the finest structures and are crucial for the production of powerful microchips.

Within ZEISS Semiconductor Mask Solutions (SMS) we offer high-end solutions for the production of photomasks. The portfolio includes mask metrology, tuning, qualification, and repair solutions that cover a wide range of mask types and lithography techniques in the DUV and EUV spectral range – for maximum efficiency in semiconductor manufacturing and maximum yield of defect-free, functional microchips per wafer.

Within ZEISS Process Control Solutions (PCS), we offer highly precise systems for process control in semiconductor manufacturing. The portfolio includes the 3D Metrology and Inspection Workstation – a FIB-SEM combination for nanometer-accurate sampling and 3D analyses – as well as the ZEISS MultiSEM – a unique multi-beam scanning electron microscope with 91 parallel electron beams for ultra-fast 2D analyses. These solutions provide critical information for analysis, process optimization, and troubleshooting for faster and more efficient manufacturing of finest microchip structures.

Germany

• Oberkochen (Baden-Württemberg): Headquarters and central R&D, and production site for lithography optics (ZEISS SMO)
• Jena (Thuringia): At the ZEISS founding site, optical mask systems are developed, and mask repair, qualification, and metrology systems of ZEISS SMS are manufactured.
• Wetzlar (Hesse): Production site for lithography optics
• Rossdorf (Hesse): R&D site for ZEISS SMS, focusing on mask repair systems
• Aachen (North Rhine-Westphalia): R&D site
• Coswig (Saxony): Site for development and production

International

• Zurich (Switzerland): Site for development and production 
• Dublin (USA): R&D site for ZEISS PCS
• Bar Lev (Israel): R&D site for ZEISS SMS, focusing on mask tuning systems

Additionally, we have our sales and service companies (SSCs) in the US, China, Taiwan (region), South Korea, and Japan:

• USA: Dublin (SSC), Phoenix, Boise, Hillsboro (ZEISS SMS service locations)
• China: Shanghai (SSC), Jinan (ZEISS SMS service location)
• Taiwan (Region): Hsinchu (SSC), Tainan, Taichung (ZEISS SMS service locations)
• South Korea: Seoul (SSC), DongTan, Pyeongtaek (ZEISS SMS service locations)
• Japan: Tokyo (SSC)