Semiconductor Mask Solutions
ZEISS Semiconductor Mask Solutions (SMS)

Our Solutions boost Your Productivity

Broad range of mask solutions enables flawless production of high-end photomasks

ZEISS is a leading supplier of manufacturing and metrology equipment for the global Semiconductor Industry. With focus on a key component in the semiconductor manufacturing process, the photomask, ZEISS SMS enables its customers to produce perfect photomasks enabling highest yields. Our products range from mask metrology, tuning, qualification to repair solutions and cover a broad range of mask types and lithography techniques in DUV and EUV.
At ZEISS SMS we rely on a global network of local Sales and Service Centers in close proximity to our customers. Dedicated field service teams and spare part hubs in Asia, USA und Europe allow for fast response times fulfilling production requirements.


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