![A man sits at the kitchen table reading ZEISS SMT publications on a tablet]({"xsmall":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.100.33.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","small":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.360.120.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","medium":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.768.256.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","large":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.1024.341.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.1280.427.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.1440.480.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg","max":"https://www.zeiss.com/content/dam/smt/products/publications/publications-lithographie-smt-zeiss-smo.jpg/_jcr_content/renditions/original.image_file.1920.640.0,229,2000,896.file/publications-lithographie-smt-zeiss-smo.jpg"} "Publications of ZEISS SMT")
Papers & lectures
Publications and lectures from the ZEISS SMT world
For more knowledge about semiconductor manufacturing technologiesExplore technical papers, publications, and conference presentations authored by ZEISS experts in the fields of Photomask Solutions and Wafer Fab Solutions. Discover current research, technological developments, and collaborative publications created with industry and academic partners.